“…1,2 Under these circumstances, more and more attention is being paid to microstructure optics elements because various optical elements with submicrometer-sized structure, for instance, diffractive microlens, refractive microlens, and microlens arrays, are of importance in the integrated micro-opto-electro-mechanical systems (MOEMs). However, because of their small feature sizes, the light scattering effect in the elements is more important than the light diffraction effect, and the scalar diffraction theory conventionally used fails completely.…”