2020
DOI: 10.1002/cphc.202000561
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Data‐Driven Investigation of Monosilane and Ammonia Co‐Pyrolysis to Silicon‐Nitride‐Based Ceramic Nanomaterials

Abstract: With its high strength, high thermal stability, low density, and high electrical resistance, silicon-nitride-based ceramics have been widely used as gate insulating layers, oxidation masks, and passivation layers. Employing SiN nanomaterials in anode applications also improves rate performances and cycling stability of the lithium-ion batteries. However, a fundamental understanding of the SiN synthetic process remains elusive. SiN gas-phase synthesis can be tailored with a comprehensive understanding of the un… Show more

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Cited by 6 publications
(9 citation statements)
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“…[25][26][27][28] This procedure was performed automatically using a modified version of the CalcK script previously employed by our group for reaction kinetics analysis. 29…”
Section: Quantum Chemical Calculations and Statistical Thermodynamicsmentioning
confidence: 99%
See 1 more Smart Citation
“…[25][26][27][28] This procedure was performed automatically using a modified version of the CalcK script previously employed by our group for reaction kinetics analysis. 29…”
Section: Quantum Chemical Calculations and Statistical Thermodynamicsmentioning
confidence: 99%
“…The single-event parameters of the Arrhenius relationship, logIJA) and E A were obtained by fitting lnIJk) versus T −1 over the temperature range 298-1500 K. This procedure was performed automatically using a modified version of the CalcK script previously employed by our group for reaction kinetics analysis. [29][30][31][32][33][34][35][36][37][38][39][40] Through linear regression analysis, we determined Arrhenius behavior was obeyed well for all reactions. The solvation impact of liquid phase kinetics is beyond the scope of this work but will be addressed in future studies following the work of Jalan et al, which computes liquid-phase kinetics in relation to both the solute and the solvent.…”
Section: Reaction Chemistry and Engineering Papermentioning
confidence: 99%
“…The extent of bond formation or bond decomposition along a reaction pathway was analyzed by the concept of bond order. This analysis has been used to investigate the molecular mechanism of chemical reactions mainly for gas-phase hydrocarbons with different functional groups; however, our group has had success for similar silicon nitride species . To examine the nature of the hydrogen migration (or shift) process, the Wiberg bond indexes have been calculated by using NBO 7.0 analysis as implemented in Gaussian16.…”
Section: Resultsmentioning
confidence: 99%
“…The harmonic frequencies and zero-point energy were scaled by factors of 0.96 and 0.98, respectively, to account for anharmonicity in the normal vibrational modes as suggested by Scott and Radom . It was reasonable to choose the G3//B3LYP level of theory since we have shown an excellent prediction for thermodynamic properties of hydrogenated silicon nitrides …”
Section: Computational Methodologymentioning
confidence: 99%
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