Damage studies in dry etched textured silicon surfaces

Kumaravelu, G.; Alkaisi, Maan M.; Bittar, A.; Macdonald, Daniel; Zhao, Jianhua

doi:10.1016/j.cap.2003.10.008

Cited by 77 publications

(43 citation statements)

References 5 publications

(5 reference statements)

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“…These techniques are high cost, low throughputs and some suitable only for relatively large features and not for nanoscale applications. Another method of fabricating 3-D structures is by the surface texturing technique using either dry plasma RIE process (Kumaravelu et al 2004) or wet chemical etching. A 3-D sub-wavelength surface texturing can also be fabricated using interferometric lithography patterning followed by RIE (Chiu et al 2006) but these are used for periodic patterns only.…”

Section: Research Backgroundmentioning

confidence: 99%

Three-Dimensional Patterning Using Ultraviolet Nanoimprint Lithography

Alkaisi¹,

Mohamed²

2010

Lithography

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Section: Research Backgroundmentioning

confidence: 99%

Three-Dimensional Patterning Using Ultraviolet Nanoimprint Lithography

Alkaisi¹,

Mohamed²

2010

Lithography

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“…The knowledge of their variation with thin film deposition conditions would allow us to optimise the fabrication parameters. Photoconductance decay [6], surface photo voltage [7], photoluminescence [8], transient microwave reflectance technique [9] and Thin Solid Films 518 (2010) [1767][1768][1769][1770][1771][1772][1773] quasi steady state photo conductance [10] are widely used for characterizing the minority carrier lifetime and diffusion length. Although the number of methods for evaluating SRV and minority carrier lifetime has been reported, specific environment conditions and complex techniques are required in all these methods, which limit the wide application of these techniques.…”

Section: Introductionmentioning

confidence: 99%

Non-destructive evaluation of carrier transport properties in CuInS2 and CuInSe2 thin films using photothermal deflection technique

et al. 2010

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Photothermal deflection technique (PTD) is a non-destructive tool for measuring the temperature distribution in and around a sample, due to various non-radiative decay processes occurring within the material. This tool was used to measure the carrier transport properties of CuInS 2 and CuInSe 2 thin films. Films with thickness <1 μm were prepared with different Cu/In ratios to vary the electrical properties. The surface recombination velocity was least for Cu-rich films (5 × 10 5 cm/s for CuInS 2 , 1×10 3 cm/s for CuInSe 2 ), while stoichiometric films exhibited high mobility (0.6 cm 2 /V s for CuInS 2, 32 cm 2 /V s for CuInSe 2 ) and high minority carrier lifetime (0.35 µs for CuInS 2 , 12 µs for CuInSe 2 ).

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“…For example, it was found that significant surface damage is introduced when researchers employ dry etching in nanomaterial syntheses. [126] In another example, in order to fabricate black Si by metal-assisted chemical etching, the randomness of lateral oxidation and the dissolution/re-deposition of metal nanoparticles on the surface due to the redox of the metal can contribute to the atomic-scale roughness of the material's surface. An atomically rough surface is useless for light harvesting and causes more surface defects due to the increase in surface area, which is difficult to passivate and detrimental for carrier collection.…”

Section: Modifying Final Morphologies Of Nanostructuresmentioning

confidence: 99%

Toward Highly Efficient Nanostructured Solar Cells Using Concurrent Electrical and Optical Design

Wang

2017

Advanced Energy Materials

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For example, the multiple exciton generation (MEG) effect, observed in quantum dots (QDs), could have the potential to boost the Shockley-Queisser efficiency limit from 33.7% to 44.0%. [4,5] Nanostructured absorbers, featuring subwavelength features, can achieve an absorption enhancement factor higher than the conventional ray-optic limit across a broadband range of wavelengths, which opens an entirely new way of designing highly efficient nanostructured solar cells. [6,7] Meanwhile, the utilization of nanostructures can improve carrier collection by promoting the separation of photogenerated carriers and shortening the diffusion length of charge carriers using core-shell architectures. [8] However, despite the advantages of nanostructures, at present the efficiency of these solar cells remains lower than that of first-and second-generation devices. Compared with commercially available Si wafer photovoltaics, whose energy conversion efficiency can reach 25.6%, the record energy conversion efficiency of a nanostructured Si solar cell is only 22.1%, which is still far from the Shockley-Queisser efficiency limit of 32.0%. [9,10] This limited performance is due to the fact that most nanostructures bring accompanying optical or electrical losses to solar cells (Figure 1). [11][12][13][14][15] In fact, most nano-based solar cells have relatively low open-circuit voltages (V OC ) and a disproportionate enhancement of the short-circuit current density (J SC ) compared to the absorption enhancement via light-trapping nanostructures. Therefore, in order to avoid the counterbalance of optical and electrical gains by the accompanying losses associated with nanomaterials, it is necessary to look beyond singularly focused optical or electrical promotion schemes, and instead shift toward the concurrent design of electrical and optical properties using a combined perspective to achieve highly efficient nanostructured solar cells.Thus far, many excellent reviews have summarized different photon management or light-harvesting schemes with the use of nanostructures. [16][17][18][19][20][21][22][23][24] These authors point out that important work remains to ensure that improved optical absorption does not come at the sacrifice of the device's electrical properties. [16,17,[19][20][21][22][23][24] However, there have been few reviews that propose a solution for how to overcome this challenge. Recently, there has been considerable effort to increase both light absorption and the photogenerated carrier collection Recent technological advances in conventional planar and microstructured solar cell architectures have significantly boosted the efficiencies of these devices near the corresponding theoretical values. Nanomaterials and nano structures have promising potential to push the theoretical limits of solar cell efficiency even higher using the intrinsic advantages associated with these materials, including efficient photon management, rapid charge transfer, and short charge collection distances. However, at present the efficiency of...

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Damage studies in dry etched textured silicon surfaces

Cited by 77 publications

References 5 publications

Three-Dimensional Patterning Using Ultraviolet Nanoimprint Lithography

Three-Dimensional Patterning Using Ultraviolet Nanoimprint Lithography

Non-destructive evaluation of carrier transport properties in CuInS2 and CuInSe2 thin films using photothermal deflection technique

Toward Highly Efficient Nanostructured Solar Cells Using Concurrent Electrical and Optical Design

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