CVD synthesis of multi-layered polycrystalline diamond films with reduced roughness using time-limited injections of N2 gas

Седов, В. С.; Martyanov, Artem; Savin, Sergey; Zavedeev, E. V.; Kudryavtsev, Oleg; Bland, Henry A.; Mandal, Soumen; Williams, Oliver A.; Ralchenko, V.G.; Konov, V. I.

doi:10.1016/j.diamond.2021.108333

Cited by 19 publications

(7 citation statements)

References 55 publications

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“…[34] In viewing of the progress of diamond growth and micromachining technologies, different diamond forms such asMCD, NCD, UNCD, and SCD were developed to fabricate diamond MEMS devices. [14,[35][36][37][38][39][40][41][42]…”

Section: Microfabrication Of Diamond Memsmentioning

confidence: 99%

Diamond MEMS: From Classical to Quantum

Sun,

Zhang,

Liu

et al. 2023

Adv Quantum Tech

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Diamond has numerous outstanding properties in mechanics, physics, chemistry, electronics, thermodynamics, and spintronics for either classic micro/nanoelectromechanical systems (MEMS/NEMS) devices or hybrid quantum MEMS/NEMS systems. The extremely high mechanical strength and the ultra‐wide bandgap energy enable the development of mechanically and thermally robust MEMS/NEMS sensors and switches, while the long coherence time of spin defects center enables the reading out through optical methods, precise quantum sensing, and quantum information processing. In this paper, the development of diamond‐based MEMS/NEMS from the viewpoints of classic devices to quantum systems are reviewed. The fabrication process and the classic applications of diamond MEMS/NEMS devices are first described, including those from micro‐crystalline, nano‐crystalline/ultranano‐crystalline, and single‐crystalline diamonds. Then, the physical properties of nitrogen‐vacancy defect center, as well as the application referred to the hybrid system composed of MEMS structures and nitrogen‐vacancy centers embedded, strain–spin interaction, and diamond‐based optomechanics are introduced. Finally, a conclusion and outlook are presented. It is expected that diamond MEMS/NEMS is not only an ideal platform for high‐performance and high‐reliability advanced classic MEMS devices but also for quantum sensing, information, and exploring the fundamentals of quantum mechanics.

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Section: Microfabrication Of Diamond Memsmentioning

confidence: 99%

Diamond MEMS: From Classical to Quantum

Sun,

Zhang,

Liu

et al. 2023

Adv Quantum Tech

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“…Polycrystalline diamond coating with alternating layers with micro-and nanostructure (MCD/NCD) was grown in a microwave (2.45 GHz) plasma CVD reactor ARDIS-100 (Optosystems, Moscow, Russia) [31,32]. The lower layer of the coating was grown in a mode that ensures the growth of the microcrystalline diamond fraction for 10 min for the reliable formation of diamond nuclei from the deposited layers of diamond particles seed [33] in a methane/hydrogen gas mixture with a methane concentration of 4% at a substrate temperature of 850 • C. Then, a multilayer polycrystalline diamond film was formed by periodic nitrogen injection, which ensures the growth of the nanocrystalline fraction [34], reducing the overall roughness of the coating surface. The total deposition time was 6 h with an average growth rate of ~1 µm/h.…”

Section: Tool Coatingsmentioning

confidence: 99%

Wear of Carbide Plates with Diamond-like and Micro-Nano Polycrystalline Diamond Coatings during Interrupted Cutting of Composite Alloy Al/SiC

Ashkinazi,

Fedorov,

Martyanov

et al. 2023

JMMP

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The complexity of milling metal matrix composite alloys based on aluminum like Al/SiC is due to their low melting point and high abrasive ability, which causes increased wear of carbide tools. One of the effective ways to improve its reliability and service life is to modify the surface by plasma chemical deposition of carbon-based multilayer functional layers from vapor (CVD) with high hardness and thermal conductivity: diamond-like (DLC) or polycrystalline diamond (PCD) coatings. Experiments on an indexable mill with CoroMill 200 inserts have shown that initial tool life increases up to 100% for cases with DLC and up to 300% for multilayered MCD/NCD films at a cutting speed of 800 m/min. The primary mechanism of wear of a carbide tool in this cutting mode was soft abrasion, when wear on both the rake and flank surfaces occurred due to the extrusion of cobalt binder between tungsten carbide grains, followed by their loss. Analysis of the wear pattern of plates with DLC and MCD/NCD coatings showed that abrasive wear begins to prevail against the background of soft abrasion. Adhesive wear is also present to a lesser extent, but there is no chipping of the base material from the cutting edge.

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“…It is well known that secondary nucleation processes can be stimulated by small additions of nitrogen [28,41]. Using cyclic small additions of nitrogen, it is possible to reduce the relative roughness of diamond coatings by more than three times and, at the same time, maintain the overall high quality and phase purity of the material [42]. Another main factor affecting this process is the content of methane in the reaction gas mixture: high concentrations stimulate secondary nucleation [43][44][45][46] and lead to the formation of NCD films.…”

Section: Introductionmentioning

confidence: 99%

Synthesis of Polycrystalline Diamond Films in Microwave Plasma at Ultrahigh Concentrations of Methane

et al. 2023

Self Cite

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Polycrystalline diamond (PCD) films are usually grown by chemical vapor deposition (CVD) in hydrogen–methane mixtures. The synthesis conditions determine the structure and quality of the grown material. Here, we report the complex effect of the microwave plasma CVD conditions on the morphology, growth rate and phase composition of the resulting PCD films. Specifically, we focus on the factors of (i) increased methane concentrations (νc) that are varied over a wide range of 4%–100% (i.e., pure methane gas) and (ii) substrate temperatures (Ts) varied between 700–1050 °C. Using scanning electron microscopy, X-ray diffraction and Raman spectroscopy, we show that diamond growth is possible even at ultrahigh methane concentrations, including νc = 100%, which requires relatively low synthesis temperatures of Ts < 800 °C. In general, lower substrate temperatures tend to facilitate the formation of higher-quality PCD films; however, this comes at the cost of lower growth rates. The growth rate of PCD coatings has a non-linear trend: for samples grown at Ts = 800 °C, the growth rate increases from 0.6 µm/h at νc = 4% to 3.4 µm/h at νc = 20% and then falls to 0.6 µm/h at νc = 100%. This research is a step toward control over the nature of the CVD-grown PCD material, which is essential for the precise and flexible production of diamond for various applications.

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CVD synthesis of multi-layered polycrystalline diamond films with reduced roughness using time-limited injections of N2 gas

Cited by 19 publications

References 55 publications

Diamond MEMS: From Classical to Quantum

Diamond MEMS: From Classical to Quantum

Wear of Carbide Plates with Diamond-like and Micro-Nano Polycrystalline Diamond Coatings during Interrupted Cutting of Composite Alloy Al/SiC

Synthesis of Polycrystalline Diamond Films in Microwave Plasma at Ultrahigh Concentrations of Methane

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