2011
DOI: 10.1088/0034-4885/75/1/016501
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CVD of polymeric thin films: applications in sensors, biotechnology, microelectronics/organic electronics, microfluidics, MEMS, composites and membranes

Abstract: Polymers with their tunable functionalities offer the ability to rationally design micro- and nano-engineered materials. Their synthesis as thin films have significant advantages due to the reduced amounts of materials used, faster processing times and the ability to modify the surface while preserving the structural properties of the bulk. Furthermore, their low cost, ease of fabrication and the ability to be easily integrated into processing lines, make them attractive alternatives to their inorganic thin fi… Show more

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Cited by 156 publications
(117 citation statements)
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References 227 publications
(263 reference statements)
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“…iCVD is a versatile platform for fabrication of a wide range of polymer thin lms preserving the organic functionalities of monomer precursors. 25,26 The vapor deposition approach is ideal for coatings of limited solubility, such as the low surface energy uoropolymers desired for icephobic applications. 27,28 The iCVD polymer lms grow from the substrate up, enabling interfacial engineering at the initial growth interface to promote adhesion of the lm to the substrate.…”
mentioning
confidence: 99%
“…iCVD is a versatile platform for fabrication of a wide range of polymer thin lms preserving the organic functionalities of monomer precursors. 25,26 The vapor deposition approach is ideal for coatings of limited solubility, such as the low surface energy uoropolymers desired for icephobic applications. 27,28 The iCVD polymer lms grow from the substrate up, enabling interfacial engineering at the initial growth interface to promote adhesion of the lm to the substrate.…”
mentioning
confidence: 99%
“…Different methods for deposition of the thin polymer films from gas phase (including HW CVD) for various applications were reviewed in [10]. The paper contains data concerned PFP, FP and other industrially valuable polymer films applications in the fields of sensors, medicine, biotechnology, microelectronics, organic electronics, microfluidics etc.…”
Section: Fp Coatings Applications In Bio/medicinementioning
confidence: 99%
“…Polymer consisting of repeating units of monomers is highly explored in various fields, owing to its non-toxicity [1], simple fabrication methodology and low cost [2,3], large surface-to-volume ratio [4] and easy modification [5]. The conjugated polymers have received particular attentions with their wide applications in batteries [6], organic light emitting diodes [2,4,7], and sensor [2,[4][5][6][8][9][10], due to their unique metallic and semiconducting properties [4] as well as the fluorescence properties [4,5,11].…”
Section: Introductionmentioning
confidence: 99%