CVD‐Fabricated Aluminum Oxide Coatings from Aluminum tri‐<i>iso</i>‐propoxide: Correlation Between Processing Conditions and Composition

Gleizes, Alain; Vahlas, Constantin; Sovar, Maria-Magdalena; Samélor, Diane; Lafont, Marie‐Christine

doi:10.1002/cvde.200606532

Cited by 54 publications

(67 citation statements)

References 54 publications

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“…Silicon substrates (10 × 10 mm) cut from 4″ Si (001) wafers (Sil'tronix-ST), placed at intermediate positions, were also coated and used for TEM analysis. We have already demonstrated that the characteristics of aAl 2 O 3 films are independent of the nature of the substrate, namely AISI 304 L stainless steel (SS), (100) oriented Si wafers, and thermally grown silica on Si wafers [13]. All samples were cleaned in an ultrasonic bath with acetone and ethanol, and were immediately introduced to the reactor.…”

Section: Thin Film Depositionmentioning

confidence: 99%

“…The authors group has developed various chemical vapor deposition, CVD processes for the production of amorphous alumina, a-Al 2 O 3 films [13][14][15]. Such films, processed from aluminum tri-isopropoxide, ATI contain a large percentage of penta-coordinated Al 3+ ions, as was demonstrated by 27 Al nuclear magnetic resonance, NMR spectroscopy [16].…”

Section: Introductionmentioning

confidence: 99%

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Nanocomposite thin film of Ag nanoparticles embedded in amorphous Al 2 O 3 on optical sensors windows: Synthesis, characterization and targeted application towards transparency and anti-biofouling

Tendero

Lazar

Samélor

et al. 2017

Surface and Coatings Technology

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OATAO is an open access repository that collects the work of Toulouse researchers and makes it freely available over the web where possible.Nanocomposite thin film of Ag nanoparticles embedded in amorphous Al 2 O 3 on optical sensors windows: Synthesis, characterization and targeted application towards transparency and anti-biofouling t r a c tIncreased motivation for environmental monitoring requires robust and reliable sensors. The present work aims at increasing the service time of optical sensors immersed in riverine waters by decreasing the development of biofouling on their surface. In this aim, nanocomposite coatings composed of metallic silver nanoparticles embedded in an amorphous alumina are co-deposited on sensor glass windows by chemical vapor deposition. Immersion for one week in the Saulx river, France, revealed a threefold decrease of biofouling on their surface compared with untreated glass surfaces while maintaining transparency. Such coatings can be considered as part of integrated tools, including for example mechanical cleaning, to reduce the maintenance of optical sensors immerged in riverine waters.

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Section: Thin Film Depositionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Nanocomposite thin film of Ag nanoparticles embedded in amorphous Al 2 O 3 on optical sensors windows: Synthesis, characterization and targeted application towards transparency and anti-biofouling

Tendero

Lazar

Samélor

et al. 2017

Surface and Coatings Technology

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“…Significant work has been provided by the authors in the recent years in this field. Especially, the relation between the operating conditions of Metalorganic Chemical Vapor Deposition (MOCVD) and the characteristics of the obtained amorphous Al 2 O 3 coatings, including the modeling of the process considering appropriate chemical kinetic schemes [1][2][3][4][5][6] was discussed. The rationale of these investigations is based on two pillars: the first concerns the moderate deposition temperature which is compatible with the thermal loads the substrate can tolerate without modification of its microstructure and, consequently of its properties and performance.…”

Section: Introductionmentioning

confidence: 99%

Mechanical and barrier properties of MOCVD processed alumina coatings on Ti6Al4V titanium alloy

Balcaen

Radutoiu

Alexis

et al. 2011

Surface and Coatings Technology

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This study focuses on the implementation of different aluminum oxide coatings processed by metal-organic chemical vapor deposition from aluminum tri-isopropoxide on commercial Ti6Al4V titanium alloy to improve its high temperature corrosion resistance. Films grown at 350°C and at 480°C are amorphous and correspond to formulas AlOOH, and Al 2 O 3 , respectively. Those deposited at 700°C are composed of γ-Al 2 O 3 nanocrystals dispersed in a matrix of amorphous alumina. Their mechanical properties and adhesion to the substrates were investigated by indentation, scratch and micro tensile tests. Hardness and rigidity of the films increase with increasing deposition temperature. The hardness of the coatings prepared at 350°C and 480°C is 5.8 ± 0.7 GPa and 10.8 ± 0.8 GPa respectively. Their Young's modulus is 92 ± 8 GPa (350°C) and 155 ± 6 GPa (480°C). Scratch tests cause adhesive failures of the films grown at 350°C and 480°C whereas cohesive failure is observed for the nanocrystalline one, grown at 700°C. Micro tensile tests show a more progressive cracking of the latter films than on the amorphous ones. The films allow maintaining good mechanical properties after corrosion with NaCl deposit during 100 h at 450°C. After corrosion test only the film deposited at 700°C yields an elongation at break comparable to that of the as processed samples without corrosion. The as established processing-structure-properties relation paves the way to engineer MOCVD aluminum oxide complex coatings which meet the specifications of the high temperature corrosion protection of titanium alloys with regard to the targeted applications.

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“…Gleizes et al measured similar O/Al atomic ratio (EPMA) for alumina coatings deposited by MOCVD with vaporized ATI in the temperature range of 480-600 °C. [ 15 ] The evolution of the elemental composition with deposition temperature observed by EPMA was further investigated using XPS (Figure 2 b). The amount of aliphatic carbon (C-C and C-H bonds only) is less than 1 at% and likely results from small amounts of solvent residue incorporated in the coating during growth.…”

Section: Composition and Morphology Of Amorphous Alumina Coatingsmentioning

confidence: 99%

“…[ 7,8,[11][12][13][14][15][16] ATI yields amorphous and stoichiometric alumina coatings with a smooth and dense microstructure at 5 Torr in the temperature range 420 to 650 °C. [ 7,8,14,15 ] Higher process temperatures lead to the deposition of nanocrystallized γ -Al 2 O 3 [ 15 ] or to the homogeneous decomposition of ATI, which generates a different microstructure. [ 11 ] The ATI molecule is well described in the literature.…”

mentioning

confidence: 99%

Amorphous Alumina Barrier Coatings on Glass: MOCVD Process and Hydrothermal Aging

Etchepare

Baggetto

Vergnes

et al. 2016

Adv Materials Inter

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OATAO is an open access repository that collects the work of Toulouse researchers and makes it freely available over the web where possible. This is an author-deposited version published in : http://oatao.univ-toulouse.fr/ Eprints ID : 15772 [ 9 ] radio frequency magnetron sputtering, [ 2 ] atomic layer deposition, [ 10 ] sol-gel, [ 5 ] and metalorganic chemical vapor deposition (MOCVD). [ 7,[11][12][13] CVD is one of the most attractive techniques for the time effi cient deposition of such coatings on complexin-shape geometries with conformal coverage, i.e., uniform thickness along the surface. Composition, stoichiometry, crystallinity, and microstructure of the material can be adjusted by fi ne tuning of the MOCVD experimental parameters such as reactor design, precursor selection, reactive atmosphere, deposition temperature, and pressure. The MOCVD of alumina from vaporized aluminum tri-isopropoxide (ATI) is very well documented. [ 7,8,[11][12][13][14][15][16] ATI yields amorphous and stoichiometric alumina coatings with a smooth and dense microstructure at 5 Torr in the temperature range 420 to 650 °C. [ 7,8,14,15 ] Higher process temperatures lead to the deposition of nanocrystallized γ -Al 2 O 3 [ 15 ] or to the homogeneous decomposition of ATI, which generates a different microstructure. [ 11 ] The ATI molecule is well described in the literature.[ 17 ] It is sensitive to water vapor and thus it is subjected to ageing upon exposure to ambient atmosphere, which results in its partial or total hydrolysis in nonvolatile compounds, Al(O i Pr) 3− n (OH) n ( n = 1, 2) and Al(OH) 3 , respectively. [ 12,17 ] The precursor is usually melted, maintained in supercooled state, and vaporized with a bubbler.Despite the simplicity and the cost effectiveness of this solution, the use of ATI in the supercooled state has two drawbacks. First, maintaining ATI at the vaporization temperature for a long-period impacts the stability of the molecule and subsequently the coating quality. [ 12 ] Second, it is diffi cult to know exactly the mass fl ow rate of the generated reactive gas. Such poorly controlled transport conditions lead to nonreproducible processes, especially for the present case when low activation energy prevails in the entire temperature range of interest, de facto resulting in mass transport limited process. The direct liquid injection (DLI) technology overcomes these drawbacks with the controlled vaporization of the solution made of ATI dissolved in a carrier solvent. [ 18 ] The DLI of ATI is insuffi ciently documented in the literature. Song et al. [ 19 ] and Krumdieck et al. [ 13 ] implemented the technique in a pulsedpressure MOCVD process. The authors used a solution of ATI in n -octane and in dry toluene, respectively. Coatings obtained

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CVD‐Fabricated Aluminum Oxide Coatings from Aluminum tri‐iso‐propoxide: Correlation Between Processing Conditions and Composition

Cited by 54 publications

References 54 publications

Nanocomposite thin film of Ag nanoparticles embedded in amorphous Al 2 O 3 on optical sensors windows: Synthesis, characterization and targeted application towards transparency and anti-biofouling

Nanocomposite thin film of Ag nanoparticles embedded in amorphous Al 2 O 3 on optical sensors windows: Synthesis, characterization and targeted application towards transparency and anti-biofouling

Mechanical and barrier properties of MOCVD processed alumina coatings on Ti6Al4V titanium alloy

Amorphous Alumina Barrier Coatings on Glass: MOCVD Process and Hydrothermal Aging

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