CVD Encapsulation of Laser-Graphitized Electrodes in Diamond Electro-Optical Devices
Maxim S. Komlenok,
Vitali V. Kononenko,
Andrey P. Bolshakov
et al.
Abstract:Conductive graphitized grooves on the dielectric surface of diamond have been created by KrF excimer laser radiation. The advantages of such a circuit board in high-field applications is rather limited because the crystal surface has a relatively low electrical breakdown threshold. To increase the electrical strength, a method of encapsulating surface conductive graphitized structures by chemical vapor deposition of an epitaxial diamond layer has been proposed and realized. The quality of the growth diamond is… Show more
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