2023
DOI: 10.1016/j.vacuum.2022.111564
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CVD controlled preparation and growth mechanism of 2H-WS2 nanosheets

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Cited by 12 publications
(9 citation statements)
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“…The calculated values of the lattice constants are a=3.154, b=3.154 Å, and c=12.362 Å. The lattice values match the previously reported data [42,43] …”
Section: Resultssupporting
confidence: 87%
See 1 more Smart Citation
“…The calculated values of the lattice constants are a=3.154, b=3.154 Å, and c=12.362 Å. The lattice values match the previously reported data [42,43] …”
Section: Resultssupporting
confidence: 87%
“…The lattice values match the previously reported data. [42,43] The peak's full width at half maximum (FWHM) is inversely proportional to the crystallite size (D hkl ) of the crystallites. It can be calculated by applying the Debye-Scherrer formula, [44]…”
Section: X-ray Diffraction Analysismentioning
confidence: 99%
“…We employed a constant flow in a quartz tube to retain the precursor to establish a stable air flow environment, which guarantees that the WS 2 vapor is thoroughly volatilized and evenly dispersed throughout the reaction process. As a result, the concentration distribution of WS 2 precursors (volatilization and diffusion) may be regarded as the primary factor influencing the various form morphologies (Yan et al, 2023).…”
Section: Resultsmentioning
confidence: 99%
“…To attain this objective, it is customary to employ elevated temperatures to guarantee an adequate source supply and a high rate of atomic surface diffusion [26][27][28][29] However, achieving TMDs with optimal characteristics necessitates precise control of growth parameters. Temperature, for instance, is a fundamental factor influencing growth kinetics and crystal structure, with specific temperature ranges tailored to different TMDs facilitating precursor diffusion and enhancing crystalline quality [30,31] Precursor flow rate governs the supply of source materials, impacting growth kinetics and thickness uniformity. It is crucial to maintain an optimal flow rate to avoid excessive precursor decomposition or limited source availability, ensuring controlled growth and the required thickness [18,24,25]Additionally, growth time significantly affects the extent of TMD formation and crystal size, with longer durations promoting complete precursor conversion and yielding larger crystals.…”
Section: Introductionmentioning
confidence: 99%
“…However, extended growth times may also introduce defects and impurities, necessitating a balance between growth duration and material quality [13,14]. The amount of material utilized in the growth process is crucial in ascertaining the dimensions and thickness of TMDs materials [16,32]. Precursor concentration directly affects the nucleation density and growth rates, with higher concentrations leading to denser nucleation and faster growth, resulting in larger and thicker TMD crystals.…”
Section: Introductionmentioning
confidence: 99%