“…added into CrN films for improved properties, such as Ag [20][21][22], Cu [23][24][25], W [26], Al [27,28], Si [29], Ti [30], Zr [31,32], etc., copper is an unusual element because copper and chromium are immiscible and cannot form intermetallic compounds according to equilibrium phase diagram. Therefore, the effect of the copper doping on microstructure and performance of CrN films deserves concerns.…”