Cutting nanodisks in graphene down to 20 nm in diameter
Makoto Sakurai,
Ayako Omura Okano,
Takuya Iwasaki
et al.
Abstract:A direct focused He+ beam direct machining is presented to fabricate solid-state nano-disk at the surface of a graphene multilayer micro-flake deposited on an Au/Ti/sapphire surface. At irradiation doses larger than 5.0×1017 ions/cm2 and with a beam size well below 1 nm, graphene disks down to 20 nm in diameter have been machined with for nano-disk down to 50 nm in diameter, a central hole for preparing the positioning of a rotation axle. The local heat generated by this irradiation is inducing a partial graph… Show more
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