2011
DOI: 10.1063/1.3659022
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Cutoff effects of electron velocity distribution to the properties of plasma parameters near the plasma-sheath boundary

Abstract: The plasma properties under high thermodynamic non-equilibrium condition, established due to the presence of electrically biased electrode, are investigated. Assumption of electron cut-off velocity distribution function (VDF), as done by Andrews and Varey in their investigations of the sheath region [J. Phys. A 3, 413 (1970)], has been extended here to both plasma and sheath regions. Analytic expressions for the moments of electron VDF, as well as for the electron screening temperature function dependence on t… Show more

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Cited by 7 publications
(14 citation statements)
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References 17 publications
(16 reference statements)
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“…The obtained results are in very good agreement with the model of Jelić [2] made for cold ion source in collision free plasma model. This gives a hope that the code could be used also for the studies of sheath formation in the presence of warm ion sources [19][20][21] and/or magnetic field [22][23][24], where at the moment we are still lacking reliable theoretical models.…”
Section: Discussionsupporting
confidence: 89%
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“…The obtained results are in very good agreement with the model of Jelić [2] made for cold ion source in collision free plasma model. This gives a hope that the code could be used also for the studies of sheath formation in the presence of warm ion sources [19][20][21] and/or magnetic field [22][23][24], where at the moment we are still lacking reliable theoretical models.…”
Section: Discussionsupporting
confidence: 89%
“…For smaller potential drops (up to approximately 0.5 V) the results of the simulation are even in relatively good quantitative agreement with the model [2] for the electron flow velocity U 1 and for the electron temperature kT 1 . For the electron density the quantitative agreement between our simulations and the model [2] is not so perfect, but nevertheless our simulations and the model [2] both indicate rather strong deviation of the electron density from the Boltzmann distribution, especially for small potential drops between the plasma and the electrode. If the electron flow velocity profiles are compared it can be noticed that in the model (Fig.…”
Section: Comparison With the Model Of Jelić [2]supporting
confidence: 66%
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