We fabricated diodes based on beta-gallium oxide (β-Ga2O3)/p-type 6H–SiC heterojunctions. Because the barrier height for electrons in β-Ga2O3 is much lower than the barrier height for holes in 6H–SiC, only the injection of electrons can be treated in the heterojunction. The diodes have good rectification properties even at high temperatures of up to 500°C. A breakdown voltage of over 350 V was obtained in the diode with a 233-nm-thick layer of β-Ga2O3. In the high-temperature measurements, the dependences of the rectification ratio and reverse current on temperature were evaluated and discussed. The β-Ga2O3/6H–SiC heterojunction diode has a remarkably low reverse saturation current and very high potential as a rectifier.