“…Compared with conventional planar GaN-based HEMTs, the fin-shaped GaN-based HEMTs exhibit low SS, high ON/OFF current ratio, small leakage current, and effectively suppressed short-channel effect due to the excellent gate control. 15,16 Moreover, in recent years, the fin-shaped GaN-based HEMTs only with the gate on the sidewalls (dual-gate structure) have shown excellent electrostatic isolation between the source and drain, a low knee voltage, a gradual transconductance profile near threshold, and nearly constant gain along the load line. 17 Compared with GaN-based trigate fin-shaped HEMTs, the absence of the top gate contact in GaN-based dual-gate fin-shaped HEMTs makes it more important for the gate on the sidewalls to control the channel.…”