Abstract:Electron multi-beam mask writers play a key role to expand EUV lithography usage in device mass production. It was in May 2021 when the MBMTM-2000 was released by NuFlare Technology, Inc. Since then, it has been installed at sites of mask manufactures. Accordingly, it supports their mask development and production. On top of reliable inherited mask writing technologies, newly developed technologies, which have achieved objectives, enable the multi-beam writer to make many contributions. In June 2022, the MBMTM… Show more
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