2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2023
DOI: 10.1109/asmc57536.2023.10121127
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Current Gain Reduction in Bipolar Junction Transistors Induced by Carbon Contamination from H3PO4-Based Etchant

Tan Chan Lik1,
Lihua Ning2,
Wan Tatt Wai3
et al.
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