Current Distribution on the Substrate in a Vacuum Arc Deposition Setup

Baranov, Oleg; Romanov, M.

doi:10.1002/ppap.200700160

Cited by 23 publications

(4 citation statements)

References 19 publications

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“…В проведених раніше дослідженнях було показано, що для отримання наноструктури у приповерхневому шарі при іонно-плазмовій обробці, необхідне створення певних умов [19]. Наприклад, при обробці алюмінію іонами азоту з енергією 800 еВ було досягнуто температур порядку 600-700 К [20].…”

Section: авіаційно-космічна техніка і технологія 2022 № 5(183)unclassified

Теоретичне Дослідження Температурних Полів Міді При Формуванні Наноструктурних Шарів У Плазмовому Середовищі

Shyrokyi

Sysoiev

Panchenko

2022

aktt

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The subject of study is the mathematical model for thermal processes during the formation of nanostructures in a plasma medium. In previous studies, it was shown that for the appearance of nanostructures, it is necessary that there be a certain temperature, its rate of increase, and thermal stresses. The required depth of the near-surface layer of the processed material, which is most favorable for the formation of nanostructures, is determined where the highest temperature stress gradients occur. The current work determines the technological parameters for obtaining nanostructures during ion-plasma treatment of the copper surface, as an example. The task of this work, by changing the energy of the ions, is to choose the location of the fields along the depth of the material to generate the necessary high temperature gradients in the given planes of the material. Thus, significant thermal stresses, and hence nanostructures, can be created in a large volume of material. The method used is analytical. In our work, a mathematical model was developed to describe the generation of temperature fields during ion-plasma surface treatment and tested on the process of copper treatment with oxygen ions. In this model, the joint actions of plasma flows and flows of charged particles with materials are realized through thermophysical, thermomechanical, thermal fatigue, diffusion, thermochemical, plasma-chemical processes and collisions. Therefore, the developed model will contribute to a more accurate determination of technological parameters for the formation of conditions conducive to the stable growth of nanostructures in the surface layers of processed materials. Because of numerous calculations, the dependence of the temperature of the surface layer of copper on the energy of oxygen ions was determined. The temperature fields in the zone of action of ions for three levels of the plane of the surface layer are calculated depending on the depth of penetration of ions for different times of interaction and at different current densities from 2.7∙106 to 2.1∙108 A/m2. Studies have shown that the maximum surface temperature is reached at the end of the thermal action of the ion. Conclusions. The obtained values of thermal stresses showed the possibility of formation of nanostructures in the surface layer of copper under the action of oxygen ions at a depth of x=0.5λm at a current density of 2.7∙106 A/m2. For the x=0.5λm plane at a current density of 3∙107 A/m2, where the largest temperature gradients were found, the maximum temperature stresses were calculated, amounting to 5∙108 N/m, which confirms the creation of conditions for obtaining nanostructures. But at 2.1∙108 A/m2, the total temperature rises, and the temperature gradients decrease, which decreases temperature stresses and failure to meet the conditions for obtaining nanostructures. The results obtained can be used to develop a technology for the production of nanostructures in a plasma environment, for example, on copper by ion-plasma treatment in an oxygen environment.in a plasma environment, for example, on copper by ion-plasma treatment in an oxygen environment.

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Section: авіаційно-космічна техніка і технологія 2022 № 5(183)unclassified

Теоретичне Дослідження Температурних Полів Міді При Формуванні Наноструктурних Шарів У Плазмовому Середовищі

Shyrokyi

Sysoiev

Panchenko

2022

aktt

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“…Besides, the following important assumptions were adopted in our model: (1) the ion kinetic energy is above zero at the border of the potential well, and (2) ion collisions are negligible in the pressure range considered. 19,20 Thus, the ion path is a straight line between the potential wells. The ion path before entering (y kb ), inside (y t ), and after leaving the well are sketched in Fig.…”

Section: 46mentioning

confidence: 99%

“…The application of an additional magnetic field to enhance the ion flux and affect the distribution of the ion current density over the substrate was reported. [18][19][20] In this case, the magnetic field generated by additional electromagnetic coils placed under the substrate interacts with the field generated by the focusing and guiding coils.…”

Section: Introductionmentioning

confidence: 99%

Control of ion density distribution by magnetic traps for plasma electrons

Baranov

Romanov

Fang

et al. 2012

Journal of Applied Physics

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The effect of a magnetic field of two magnetic coils on the ion current density distribution in the setup for low-temperature plasma deposition is investigated. The substrate of 400 mm diameter is placed at a distance of 325 mm from the plasma duct exit, with the two magnetic coils mounted symmetrically under the substrate at a distance of 140 mm relative to the substrate centre. A planar probe is used to measure the ion current density distribution along the plasma flux cross-sections at distances of 150, 230, and 325 mm from the plasma duct exit. It is shown that the magnetic field strongly affects the ion current density distribution. Transparent plastic films are used to investigate qualitatively the ion density distribution profiles and the effect of the magnetic field. A theoretical model is developed to describe the interaction of the ion fluxes with the negative space charge regions associated with the magnetic trapping of the plasma electrons. Theoretical results are compared with the experimental measurements, and a reasonable agreement is demonstrated.

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“…The principal difference from the well-known gas-thermal methods (plasma, detonation, gas-flame, etc.) is that the main energy source in the coating processes is the kinetic energy of not relatively light-weighted ions, atoms, or molecules [16], but of heavy high-velocity solid particles, which are the clusters of the material. The physical mechanism of CS coating is a high-velocity deformation of particles on impact, which causes intensive shear instability of the material along the contact boundaries and formation of adhesive-cohesive bonds [17].…”

Section: Introductionmentioning

confidence: 99%

Simulation of Gas Flow with Nanocomposite Carbon-Containing Powders in Supersonic Nozzle

Shorinov¹,

Polyvianyi²

2022

Metallofiz. Noveishie Tekhnol.

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Modern technologies for producing carbon nanostructures are based on many years of experience in the development of coating methods. The latest trends in the formation of carbon nanostructures are associated with complex technological processes of physical and technical treatment, when microstructures are obtained based on traditional methods, which are then completely or partially modified into nanostructures. In this case, the possibility of the formation of a part of nanostructures in a gas flow is considered in order to use them as islands of growth of other nanostructures on the treated surface. The conditions for formation of the specified structures are characterized by the energy state of particles, physical and mechanical properties of particles and substrate materials. The paper presents the results of numerical simulation for determination of velocity and temperature of nanocomposite metalmatrix powder particles in a supersonic nozzle. The necessity to determine parameters of solid particles of powder in a two-phase supersonic flow is determined. Particles velocity and temperature are the crucial parameters which allow for formation of coatings and impact their physical and mechanical properties. The contour plots of velocity and temperature distribution in the nozzle and free space from the nozzle exit to the substrate are obtained. Coating application and its characteristics are considered when selecting coating materials. The numerical simulation is performed for the particles of boron carbide (B4C) and nickel (Ni) powders. The dependence of velocity and

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Current Distribution on the Substrate in a Vacuum Arc Deposition Setup

Cited by 23 publications

References 19 publications

Теоретичне Дослідження Температурних Полів Міді При Формуванні Наноструктурних Шарів У Плазмовому Середовищі

Теоретичне Дослідження Температурних Полів Міді При Формуванні Наноструктурних Шарів У Плазмовому Середовищі

Control of ion density distribution by magnetic traps for plasma electrons

Simulation of Gas Flow with Nanocomposite Carbon-Containing Powders in Supersonic Nozzle

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