We explored the applicability of a system of self-assembled
monolayer (SAM) resists on gold, recently
developed by Tam-Chang et al. [Langmuir
1995,
11, 4371−4382], to electron-beam lithography carried
out
at high (>1000 eV) and low (<15 eV) energies. Lithography using
high-energy electrons to make
transformations of the short-alkyl-chain, amide-containing monolayer
used in this system required doses of
electrons >30 μC/cm2, whereas contamination from the
chamber in moderate vacuum (10-6 Torr)
interfered
with the process and provided equally useful resist layers against a
cyanide etch of the gold in the absence
of monolayers. Low-energy electron lithography of the same
monolayer using a scanning tunneling microscope
(STM) as the source proved more reliable and allowed the formation of
30−40 nm structures wherever the
STM tip passed over the surface with sufficient voltage and current.
Our data highlight some of the difficulties
encountered when using self-assembled monolayer resists as components
in “positive” electron-beam
lithography on gold and suggests constraints on using SAMs as ultimate
resists.