“…There are several methods for detecting acetone gas concentration, including ion-flow tube mass spectrometry, gas chromatography, colorimetry, and metal oxide semiconductor (MOS) acetone gas sensors. − Compared to these mentioned complex and expensive instruments, MOS acetone gas sensors are widely applied because of their advantages such as simple construction simplicity, good portability, and high sensitivity. In addition, MOS gas sensors based on microelectro-mechanical system (MEMS) have attracted more attention in the field of acetone detection thanks to their low power consumption, small size, easy integration, fast response, high sensitivity, and high stability. , However, MEMS-based acetone gas sensor still suffers from several problems, including the high dependence of air humidity and operating temperature, low response value, and long response/recovery time, although various gas-sensitive materials have been developed, such as SnO 2 , ZnO, Co 3 O 4 , and Fe 2 O 3 . − Moreover, selective detection of acetone target gas in complex human exhaled breath is a major challenge for MOS acetone gas sensors because exhaled breath contains various gases . As a core component of acetone gas sensors, the characteristics of gas-sensitive materials directly determine the selectivity of acetone gas sensors .…”