Crystallographic Orientation Analysis of Nanocrystalline Tungsten Thin Film Using TEM Precession Electron Diffraction and SEM Transmission Kikuchi Diffraction

Abstract

Abstract

Hybrid Deep Learning Crystallographic Mapping of Polymorphic Phases in Polycrystalline Hf0.5Zr0.5O2 Thin Films

“…Only nebulous information without clear separation of grain (or phase) boundaries was obtained, even though the symmetry mapping routine can be fast with the help of the DCNN algorithm (Figure S4a,b, Supporting Information). Nonetheless, clearly, the PACBED symmetry mapping assisted by the DCNN outperforms the conventional crystal phase mapping technique that is designed for electron nanocrystallography at a spatial resolution of less than 10 nm (Figure S4c,d, Supporting Information), [ 26 ] implying that the ML‐perspective approach provides trustworthy analytics on the nanoscale.…”

“…This additional result supports that our ML‐based methodology enables rapid and efficient crystallographic feature analysis of polycrystalline thin films composed of similar polymorphic phases. Given the difficulty of crystal symmetry mapping below a 10 nm scale with current paradigms, [ 26 ] our ML‐perspective approach could open a new chapter in the opportune development of nanoscale electronic devices while deepening the fundamental understanding of nanocrystallography.…”

“…Diffraction pattern indexing was conducted by the template matching method implemented in the ASTAR software package. [ 26 ]…”

“…Diffraction pattern indexing was conducted by the template matching method implemented in the ASTAR software package. [26] CAE for Clustering 4D-STEM CBED Patterns: The structure of the 4D-STEM clustering model was based on an autoencoder with convolutional neural networks. The encoder part in the autoencoder model had five convolutional blocks, which were composed of a convolutional layer, a rectified linear unit, and a batch normalization layer.…”

Automated Crystal Orientation Mapping by Precession Electron Diffraction-Assisted Four-Dimensional Scanning Transmission Electron Microscopy Using a Scintillator-Based CMOS Detector

“…In addition, detailed features such as sub-grain boundaries are difficult to resolve with SPED because of the limited angular resolution (~1°) of the technique (Zaefferer, 2011; Morawiec et al, 2014). In scanning electron microscopy (SEM), transmission Kikuchi diffraction (TKD) has been used as an alternative method for the characterization of nanomaterials because it has the required spatial resolution and high angular resolution (Trimby et al, 2014; Sneddon et al, 2016; Liu et al, 2019; Ernould et al, 2020; Sugar et al, 2020; Jeong et al, 2021).…”