1957
DOI: 10.1021/ac60126a609
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Crystallographic Data. 159. Aluminum Trifluoride, AlF3

Abstract: free of other barium salts); no transfer of the sample from its preparation tube to the apparatus is necessary if the sample has been collected or prepared in a standard taper centrifuge tube (The preparative or collecting test tube becomes test tube A); test tube G can be removed and placed in position A for the preparation of a uniformly mixed sample or for conversion of the obtained barium carbonate to carbon dioxide for other uses; and by use of preweighed centrifuge tubes gravimetric assay of the resultin… Show more

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Cited by 23 publications
(18 citation statements)
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“…Also, as shown in this paper, the growth behavior may be unique to various metal fluorides. The aim of the present work was to discover if YF 3 thin films can be deposited by ALD using TiF 4 as a fluorinating agent, while using Y(thd) 3 as a cation precursor. Y(thd) 3 has already been used in ALD for depositing, e.g., Y 2 O 3 , [30][31][32][33] YScO 3 , [34] and Y 2 O 2 S [35] thin films.…”
Section: Full Papermentioning
confidence: 99%
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“…Also, as shown in this paper, the growth behavior may be unique to various metal fluorides. The aim of the present work was to discover if YF 3 thin films can be deposited by ALD using TiF 4 as a fluorinating agent, while using Y(thd) 3 as a cation precursor. Y(thd) 3 has already been used in ALD for depositing, e.g., Y 2 O 3 , [30][31][32][33] YScO 3 , [34] and Y 2 O 2 S [35] thin films.…”
Section: Full Papermentioning
confidence: 99%
“…The aim of the present work was to discover if YF 3 thin films can be deposited by ALD using TiF 4 as a fluorinating agent, while using Y(thd) 3 as a cation precursor. Y(thd) 3 has already been used in ALD for depositing, e.g., Y 2 O 3 , [30][31][32][33] YScO 3 , [34] and Y 2 O 2 S [35] thin films. Another aim (given that the reaction took place) was to study various film properties including the composition of the films, because the key question is how complete the reaction can be, i.e., how completely thd ligands, and especially Ti atoms, can be eliminated from the final film.…”
Section: Full Papermentioning
confidence: 99%
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