Abstract:Post deposition thermal annealing of amorphous coatings improves optical properties of dielectric mirrors. However, excessive temperatures cause crystallization, resulting in a degradation of mechanical and optical properties. Therefore, annealing is limited to temperatures ‘below’ the crystallization threshold. The threshold is determined by x-ray diffraction (XRD) measurement which requires a significant amount of crystallized material for detection, yet it has been shown that a population of crystallites ma… Show more
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