Crystal structure and surface morphology of the Ba_0.7Sr_0.3TiO₃ thin films deposited by pulsed laser deposition

Abstract

Ba0.7Sr0.3TiO3 (BST) thin films have been deposited on Si substrates under two different temperatures (200 °C and 450 °C) by pulsed laser deposition (PLD) technique. The structural characterization of the BST thin films was performed by X‐ray diffraction (XRD) and the surface morphology was explored by atomic force microscopy (AFM). All films were found to be crystalline with preferred (100) plane orientation. The diffraction patterns from XRD analysis are attributed to cubic perovskite structure. Annealing did not result in considerable change in XRD spectra of the films. The annealing after deposition resulted in increasing of the grain size and had almost no influence on the roughness of the Ba0.7Sr0.3TiO3 thin film. (© 2009 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

Improvement of dielectric tunability and loss tangent of (Ba,Sr)TiO3thin films with K doping

“…[1] Specially, Barium strontium titanate (Ba 1−x Sr x TiO 3 , BST) has been investigated with considerable interest as a dielectric material for its large fielddependent permittivity, high dielectric constant and relatively low loss tangent. At present, BST thin films have been prepared by a variety of techniques such as radio frequency magnetron sputtering, [2,3] pulsed laser deposition, [4] metal organic chemical vapour deposition, [5,6] and chemical solution deposition (CSD). [7,8] Among these methods, the CSD method has been used widely in processing the thin films because of its various advantages such as chemical homogeneity, low cost, accuracy of stoichiometry control and especially the convenience of large area deposition.…”