Cross-section set and chemistry model for the simulation of c-C4F8 plasma discharges

Font, Gabriel; Morgan, W. L.; Mennenga, G.

doi:10.1063/1.1448894

Cited by 83 publications

(61 citation statements)

References 36 publications

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“…We employ the approach that we have used in our previous work on CHF 3 , 1 C 2 F 4 , 2,3 and c-C 4 F 8 . 4,5 We obtain the elastic cross section for TEOS from an ab initio calculation and then, making use of measured ionization cross sections, 6,7 we employ swarm analysis techniques to derive two vibrational excitation cross sections and a total dissociation cross section.…”

Section: Introductionmentioning

confidence: 99%

Electron collision cross sections for tetraethoxysilane

Morgan

Winstead

McKoy

2002

Journal of Applied Physics

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Absolute electron-impact total ionization cross sections of chlorofluoromethanes J. Chem. Phys. 121, 11653 (2004) We describe the development of a consistent set of low-energy electron-collision cross sections for tetraethoxysilane, also known as tetraethylorthosilicate. Ab initio calculations are used to obtain the elastic and momentum-transfer cross sections. These are combined with measured values of the ionization cross section and with model vibrational and electronic excitation cross sections to form a preliminary cross section set, which is then adjusted to achieve consistency with measured swarm parameters.

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Section: Introductionmentioning

confidence: 99%

Electron collision cross sections for tetraethoxysilane

Morgan

Winstead

McKoy

2002

Journal of Applied Physics

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“…Recently, high global warming potential (GWP) of SF 6 gas has stimulated the active studies of searching for a substitute gas or mixture with lower environmental impact [1] as the insulating medium. Perfluorocyclobutane (c-C 4 F 8 ) is a processing gas employed in plasma etching, which has a possible utilization as a gaseous dielectric especially in gas mixtures [2] and a potential for lowering global warming gas emissions [3] . The GWP of SF 6 is ∼23 900 times greater than that of CO 2 over a 100 year time period [4] .…”

Section: Introductionmentioning

confidence: 99%

Monte Carlo simulation of electron swarms parameters in c-C4F8/CF4 gas mixtures

Liu

Xiao

Wang

et al. 2008

J. Shanghai Jiaotong Univ. (Sci.)

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The swarm parametes for c-C4F8/CF4 mixtures, including the density-normalized effective ionization coefficient, drift velocity and mean energy were calculated using Monte-Carlo method with the null collision technique. The overall density-reduced electric field strength could be varied between 150 and 500 Td, while the c-C4F8 content in gas mixtures is varied in the range of 0-100%. The value of the density-normalized effective ionization coefficient shows a strong dependence on the c-C4F8 content, becoming more electronegative as the content of c-C4F8 is increased. The drift velocity of c-C4F8/CF4 mixtures is more affected by CF4. The calculated limiting field strength for c-C4F8/CF4 mixtures is higher than that of SF6/CF4.

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“…With additional computational effort, better low-energy results could be obtained; however, we were primarily interested in the energy range where excitation and ionization processes occur. Font et al [25] employed our calculated cross sections, along with ionization cross sections measured by Jiao et al [26], to perform a swarm analysis similar to that previously described for CHF 3 . They then used the resulting cross section set, together with a plasma chemistry that they also developed, in simulations of a plasma reactor, obtaining generally good agreement with diagnostic measurements for a variety of properties, including, for example, the densities of various radical fragments.…”

Section: C-c 4 Fmentioning

confidence: 99%

Developing Cross Section Sets for Fluorocarbon Etchants

Winstead¹,

McKoy²

2002

AIP Conference Proceedings

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Abstract. Successful modeling of plasmas used in materials processing depends on knowledge of a variety of collision cross sections and reaction rates, both within the plasma and at the surface. Electron-molecule collision cross sections are especially important, affecting both electron transport and the generation of reactive fragments by dissociation and ionization. Because the supply of cross section data is small and measurements are difficult, computational approaches may make a valuable contribution, provided they can cope with the significant challenges posed. In particular, a computational method must deal with the full complexity of low-energy electronmolecule interactions, must treat polyatomic molecules, and must be capable of computing cross sections for electronic excitation. These requirements imply that the method will be numerically intensive and thus must exploit high-performance computers to be practical. We have developed an ab initio computational method, the Schwinger multichannel (SMC) method, that possesses the characteristics just described, and we have applied it to compute cross sections for a variety of molecules, with particular emphasis on fluorocarbon and hydrofluorocarbon etchants used in the semiconductor industry. A key aspect of this work has been an awareness that cross section sets, validated when possible against swarm data, are more useful than individual cross sections. To develop such sets, cross section calculations must be integrated within a focused collaborative effort. Here we describe electron cross section calculations carried out within the context of such a focused effort, with emphasis on fluorinated hydrocarbons including CHF 3 (trifluoromethane), c-C 4 F 8 (octafluorocyclobutane), and C 2 F 4 (tetrafluoroethene).

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Cross-section set and chemistry model for the simulation of c-C4F8 plasma discharges

Cited by 83 publications

References 36 publications

Electron collision cross sections for tetraethoxysilane

Electron collision cross sections for tetraethoxysilane

Monte Carlo simulation of electron swarms parameters in c-C4F8/CF4 gas mixtures

Developing Cross Section Sets for Fluorocarbon Etchants

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