Critical points in the fabrication of microfluidic devices on glass substrates

Temporal focusing of spatially chirped femtosecond laser pulses overcomes previous limitations for ablating high aspect ratio features with low numerical aperture (NA) beams. Simultaneous spatial and temporal focusing reduces nonlinear interactions, such as self-focusing, prior to the focal plane so that deep (~1 mm) features with parallel sidewalls are ablated at high material removal rates (25 µm3 per 80 µJ pulse) at 0.04-0.05 NA. This technique is applied to the fabrication of microfluidic devices by ablation through the back surface of thick (6 mm) fused silica substrates. It is also used to ablate bone under aqueous immersion to produce craniotomies.

show abstract

“…Microfluidic channels fabricated by chemical etching have aspect ratios of less than one [15]. The illustration in Fig.…”

Section: Resultsmentioning

confidence: 99%

Temporally focused femtosecond laser pulses for low numerical aperture micromachining through optically transparent materials

et al. 2010

View full text Add to dashboard Cite

show abstract

“…Lee et al [ 45 ] demonstrated a microcapillary electrophoresis (μ-CE) device for DNA separation and detection, and the channels with curved side walls on the plastic chip were fabricated by the hot embossing method. Castaño-Álvarez et al [ 46 ] fabricated glass microfluidic channels with curved side walls by photolithography and wet-etching. The microfluidic chips were successfully used, in combination with a metal-wire end-channel amperometric detector, for capillary electrophoresis (CE).…”

Section: Discussionmentioning

confidence: 99%

Fabricating Microstructures on Glass for Microfluidic Chips by Glass Molding Process

et al. 2018

View full text Add to dashboard Cite

Compared with polymer-based biochips, such as polydimethylsiloxane (PDMS), glass based chips have drawn much attention due to their high transparency, chemical stability, and good biocompatibility. This paper investigated the glass molding process (GMP) for fabricating microstructures of microfluidic chips. The glass material was D-ZK3. Firstly, a mold with protrusion microstructure was prepared and used to fabricate grooves to evaluate the GMP performance in terms of roughness and height. Next, the molds for fabricating three typical microfluidic chips, for example, diffusion mixer chip, flow focusing chip, and cell counting chip, were prepared and used to mold microfluidic chips. The analysis of mold wear was then conducted by the comparison of mold morphology, before and after the GMP, which indicated that the mold was suitable for GMP. Finally, in order to verify the performance of the molded chips by the GMP, a mixed microfluidic chip was chosen to conduct an actual liquid filling experiment. The study indicated that the fabricating microstructure of glass microfluidic chip could be finished in 12 min with good surface quality, thus, providing a promising method for achieving mass production of glass microfluidic chips in the future.

show abstract

“…These have been fabricated by MicruX Fluidic (Oviedo, Spain) using photolithography process, wet etching, and thermal bonding. The main manufacturer's steps have been described previously [35,59].…”

Section: Microchip Designsmentioning

confidence: 99%

New analytical portable instrument for microchip electrophoresis with electrochemical detection

Fernández-la-Villa¹,

Pozo-Ayuso²,

Castaño‐Álvarez³

2010

Electrophoresis

View full text Add to dashboard Cite

A new portable instrument that includes a high voltage power supply, a bipotentiostat, and a chip holder has been especially developed for using microchips electrophoresis with electrochemical detection. The main unit of the instrument has dimensions of 150 x 165 x 70 mm (wxdxh) and consists of a four-outputs high voltage power supply with a maximum voltage of +/-3 KV and an acquisition system with two channels for dual amperometric (DC or pulsed amperometric detection) detection. Electrochemical detection has been selected as signal transduction method because it is relatively easily implemented, since nonoptical elements are required. The system uses a lithium-ion polymer battery and it is controlled from a desktop or laptop PC with a graphical user interface based on LabVIEW connected by serial RS232 or Bluetooth. The last part of the system consists of a reusable chip holder for housing the microchips, which contain all the electrical connections and reservoirs for making the work with microchips easy. The performance of the new instrument has been evaluated and compared with other commercially available apparatus using single- and dual-channel pyrex microchips for the separation of the neurotransmitters dopamine, epinephrine, and 3,4-dihydroxy-L-phenyl-alanine. The reduction of the size of the instrument has not affected the good performance of the separation and detection using microchips electrophoresis with electrochemical detection. Moreover, the new portable instrument paves the way for in situ analysis making the use of microchips electrophoresis easier.

show abstract

Critical points in the fabrication of microfluidic devices on glass substrates

Cited by 51 publications

References 42 publications

Temporally focused femtosecond laser pulses for low numerical aperture micromachining through optically transparent materials

Temporally focused femtosecond laser pulses for low numerical aperture micromachining through optically transparent materials

Fabricating Microstructures on Glass for Microfluidic Chips by Glass Molding Process

New analytical portable instrument for microchip electrophoresis with electrochemical detection

Contact Info

Product

Resources

About