Critical Nucleation Concentration for Monosilane as Function of Temperature Observed in a Free Space Reactor

Wyller, Guro Marie; Klette, H.; Nordseth, Ørnulf; Mongstad, Trygve; Filtvedt, W.O.; Marstein, Erik Stensrud

doi:10.1016/j.egypro.2016.07.100

Cited by 10 publications

(3 citation statements)

References 9 publications

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“…Absolute pressure, temperature, concentration, flow rate, turbulence intensity and centrifugal force, as well as gradients of these parameters and the reactor design influenced what kind of particles were produced. 21,22,25 The particles were produced at temperatures over 420 °C, using a centripetal acceleration of 1000-100 000 g and pressure of approximately 1 bar.…”

Section: Methodsmentioning

confidence: 99%

“…20 The cCVD process allows control over synthesis parameters such as temperature and growth time to regulate particle properties like primary and total particle size. 21,22 A means to achieve porous particles by controlled aggregation of small primary particles into larger "snow lantern-like" particles using the cCVD process, and its potential as a drug delivery material, is documented in the present study. Surface modifications were applied to wafer-derived and cCVD Si particles, to compare the applicability to the two materials.…”

Section: Introductionmentioning

confidence: 97%

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Stable “snow lantern-like” aggregates of silicon nanoparticles suitable as a drug delivery platform

Johnsen,

Hossaini Nasr,

De Luna

et al. 2024

Nanoscale

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Section: Methodsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 97%

Stable “snow lantern-like” aggregates of silicon nanoparticles suitable as a drug delivery platform

Johnsen,

Hossaini Nasr,

De Luna

et al. 2024

Nanoscale

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“…[13][14][15][16][17][18][19][20] and by modelling [see e.g. 13,16,[20][21][22][23][24][25][26][27], have been conducted to broaden the understanding of the monosilane pyrolysis.…”

Section: Pyrolysis Of Sih 4 In Solar Silicon Industrymentioning

confidence: 99%

Identification of higher order silanes during monosilane pyrolysis using gas chromatography-mass spectrometry

Wyller

Klette

Mongstad

et al. 2018

Journal of Crystal Growth

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a b s t r a c tThere is a deficit of ways to detect higher order silane isomers during silane pyrolysis. Thus, a novel instrument utilizing gas chromatography-mass spectrometry (GC-MS) for detection of higher order silanes has been developed. The instrument enables us to separate higher order silane species using gas chromatography before they are introduced to the mass spectrometer, thereby obtaining spectra of separate isomers, rather than overlaid spectra. In this contribution we describe the details of the GC-MS system. We compare our GC-separated mass spectra of mono-, di-and trisilane to mass spectra of these species available in the literature. Further, we present mass spectra of the tetrasilane isomers n-tetrasilane (n-Si 4 H 10 ), silyltrisilane (i-Si 4 H 10 ) and cyclotetrasilane (cyclo-Si 4 H 8 ) and of the pentasilane isomers n-pentasilane (n-Si 5 H 12 ), silyltetrasilane (i-Si 5 H 12 ) disilyltrisilane (neo-Si 5 H 12 ) and cyclopentasilane (cyclo-Si 5 H 10 ). Six of these mass spectra are previously unpublished. Based on the fragmentation pattern in the tetra-and pentasilane mass spectra, we are able to acquire mass spectra of silanes with up to eight silicon atoms. Finally, we apply the novel detection technique to a silane pyrolysis reactor to track the outlet concentration of higher order silanes as function of reactor temperature. We believe that the detection technique that we present here may open the door for validation of monosilane pyrolysis models, and thus constitute a roadmap for future research in this field.

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Fluidized Bed Process with Silane

Li-min¹,

Fieselmann

Chen

et al. 2017

Handbook of Photovoltaic Silicon

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Critical Nucleation Concentration for Monosilane as Function of Temperature Observed in a Free Space Reactor

Cited by 10 publications

References 9 publications

Stable “snow lantern-like” aggregates of silicon nanoparticles suitable as a drug delivery platform

Stable “snow lantern-like” aggregates of silicon nanoparticles suitable as a drug delivery platform

Identification of higher order silanes during monosilane pyrolysis using gas chromatography-mass spectrometry

Fluidized Bed Process with Silane

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