Critical dimension metrology by through-focus scanning optical microscopy beyond the 22 nm node

Attota, Ravikiran; Bunday, Benjamin; Vartanian, Victor

doi:10.1063/1.4809512

Cited by 31 publications

(42 citation statements)

References 10 publications

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“…A differential TSOM (D-TSOM) image is a pixel-by-pixel difference between two normalized [10, 17] and aligned TSOM images [19]. If the two TSOM images are obtained using two targets with slightly different dimensions, then the D-TSOM image color pattern highlights the type of dimensional difference between the two targets [10, 19, 22].…”

Section: Tsom Imaging Methodsmentioning

confidence: 99%

Fidelity test for through-focus or volumetric type of optical imaging methods

Attota¹

2018

Opt. Express

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Rapid increase in interest and applications of through-focus (TF) or volumetric type of optical imaging in biology and other areas has resulted in the development of several TF image collection methods. Achieving quantitative results from images requires standardization and optimization of image acquisition protocols. Several standardization protocols are available for conventional optical microscopy where a best-focus image is used, but to date, rigorous testing protocols do not exist for TF optical imaging. In this paper, we present a method to determine the fidelity of the TF optical data using the TF scanning optical microscopy images.

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Section: Tsom Imaging Methodsmentioning

confidence: 99%

Fidelity test for through-focus or volumetric type of optical imaging methods

Attota¹

2018

Opt. Express

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“…Through-focus scanning optical microscopy (Attota et al, 2013), confocal soft X-ray scanning transmission microscopy (Spath et al, 2015) and intravital microscopy (Masedunskas et al, 2012;Alexander et al, 2013) -subcellular imaging in living animals -are techniques which may add to the repertoire for osteocyte investigation.…”

Section: Novel Imaging Methodsmentioning

confidence: 99%

“…Sclerostin-related bone diseases. Studies of sclerosteosis and van Buchem disease, both rare high-bone mass diseases caused by mutations in the SOST gene, have led to the identification of sclerostin as a key negative regulator of bone mass (Balemans et al, 2001;Staehling-Hampton et al, 2002). Sclerostin is a glycoprotein produced by osteocytes (and chondrocytes), which is encoded by the SOST gene.…”

Section: Pathologymentioning

confidence: 99%

High-resolution 3D imaging of osteocytes and computational modelling in mechanobiology: insights on bone development, ageing, health and disease

Goggin

Zygalakis

Oreffo³

et al. 2016

eCM

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Osteocytes are involved in mechanosensation and mechanotransduction in bone and hence, are key to bone adaptation in response to development, ageing and disease. Thus, detailed knowledge of the three-dimensional (3D) structure of the osteocyte network (ON) and the surrounding lacuno-canalicular network (LCN) is essential. Enhanced understanding of the ON&LCN will contribute to a better understanding of bone mechanics on cellular and sub-cellular scales, for instance through improved computational models of bone mechanotransduction. Until now, the location of the ON within the hard bone matrix and the sub-µm dimensions of the ON&LCN have posed significant challenges for 3D imaging. This review identifies relevant microstructural phenotypes of the ON&LCN in health and disease and summarises how light microscopy, electron microscopy and X-ray imaging techniques have been used in studies of osteocyte anatomy, pathology and mechanobiology to date. In this review, we assess the requirements for ON&LCN imaging and examine the state of the art in the fields of imaging and computational modelling as well as recent advances in high-resolution 3D imaging. Suggestions for future investigations using volume electron microscopy are indicated and we present new data on the ON&LCN using serial block-face scanning electron microscopy. A correlative approach using these high-resolution 3D imaging techniques in conjunction with in silico modelling in bone mechanobiology will increase understanding of osteocyte function and, ultimately, lead to improved pathways for diagnosis and treatment of bone diseases such as osteoporosis.Keywords: Osteocyte, 3D imaging, microscopy, b i o m e c h a n i c s , l a c u n o -c a n a l i c u l a r n e t w o r k , mechanobiology, mechanosensation, mechanotransduction, osteoporosis. IntroductionThrough bone adaptation, the skeleton adapts continuously to changed mechanical loading patterns due to development, growth, ageing, disease, disuse or exercise, by removing existing and adding new bone tissue. It has been recognised that osteocytes are the key cells which orchestrate bone adaptation (Tatsumi et al., 2007). Osteocytes are ovoid cells approximately 10 µm long, surrounded by a pericellular matrix (PCM). The osteocytes and their processes form the osteocyte network (ON), which is housed within the lacuno-canalicular network (LCN), a system of voids and channels in the calcified bone matrix (Fig. 1). Neve et al., 2012). Knowledge of the three-dimensional (3D) structure of the ON&LCN would inform conclusions about the function and malfunction of osteocytes for different bone states in development, ageing, disease, disuse or exercise. More specifically, enhanced knowledge would improve the predictive power and accuracy of computational models, which attempt to elucidate the mechanisms of mechanotransduction using 3D geometries for the ON&LCN. Recent finite element and fluid-structure interaction models have used relatively low resolution image data and made a priori assumptions about the ...

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“…The second method is the optical intensity range (OIR) 24 defined as the absolute difference between the maximum and the minimum optical intensity in a given TSOM image multiplied by 100. In the a)…”

mentioning

confidence: 99%

“…The through-focus optical images were analyzed using an inhouse developed software program. 24,25 Measurements were repeated at least three times.…”

mentioning

confidence: 99%

Nanoparticle size determination using optical microscopes

Attota¹,

Kavuri²,

Kang³

et al. 2014

Applied Physics Letters

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We present a simple method for size determination of nanoparticles using conventional optical microscopes. The method, called through-focus scanning optical microscopy, makes use of the four-dimensional optical information collected at different focus positions. Low partial coherence illumination combined with analysis of through-focus optical content enables nanoparticle size determination with nanometer scale sensitivity. We experimentally demonstrate this using fabricated Si nanodots and spherical gold nanoparticles. The method is economical, as no hardware modifications to conventional optical microscopes are needed. In addition, the method also has high throughput and potential for soft nanoparticle size determination without distortion.

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Critical dimension metrology by through-focus scanning optical microscopy beyond the 22 nm node

Cited by 31 publications

References 10 publications

Fidelity test for through-focus or volumetric type of optical imaging methods

Fidelity test for through-focus or volumetric type of optical imaging methods

High-resolution 3D imaging of osteocytes and computational modelling in mechanobiology: insights on bone development, ageing, health and disease

Nanoparticle size determination using optical microscopes

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