1997
DOI: 10.1051/anphys/1997042
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Cristallisation du silicium amorphe par laser à excimères

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Cited by 2 publications
(2 citation statements)
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“…Once the whole layer is melted, a solidification front is formed and progresses from the bottom of the layer up to the top, leaving a microcrystalline structure behind. Depending on the irradiation conditions (mainly the energy density), the size of the so‐called Si grains currently range from a few tens of nm up to 1 µm 53–55. The performance of the TFT is directly related to this size.…”
Section: Display Technologymentioning
confidence: 99%
“…Once the whole layer is melted, a solidification front is formed and progresses from the bottom of the layer up to the top, leaving a microcrystalline structure behind. Depending on the irradiation conditions (mainly the energy density), the size of the so‐called Si grains currently range from a few tens of nm up to 1 µm 53–55. The performance of the TFT is directly related to this size.…”
Section: Display Technologymentioning
confidence: 99%
“…Durant cette phase, l'impulsion laser n'étant pas terminée, l'énergie laser continue à s'accumuler en surface entretenant un nouveau front de fusion qui se déplace à la vitesse de 4 à 6 mis. Lors de la solidification, les microcristaux précédemment crées servent de germes à la formation de nouveaux grains dont la taille croît avec la densité d'énergie (et l'épaisseur de silicium fondu) [3,4,5]. régime de'Super Lateral Growth' (SLG).…”
Section: Technologies Laser Disponiblesunclassified