Cricket-based robots

Birch, M.C.; Quinn, Roger D.; Hahm, G.; Phillips, Steven; Drennan, B.; Fife, Active; Beer, Randall D.; Yu, Xinyu; Garverick, S.L.; Laksanacharoen, S.; Pollack, Alan J.; Ritzmann, Roy E.

doi:10.1109/mra.2002.1160068

Cited by 21 publications

(8 citation statements)

References 9 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…4(a). With a force applied in the positive direction, plates (2) move away from plates (1) and closer to plates (3). When an ac signal is applied to the outer capacitors [plates (1) and (3)], a voltage divider is formed, as shown in Fig.…”

Section: Mems Microforce Sensingmentioning

confidence: 99%

See 1 more Smart Citation

Characterizing fruit fly flight behavior using a microforce sensor with a new comb-drive configuration

Sun

Fry

Potasek

et al. 2005

J. Microelectromech. Syst.

128

View full text Add to dashboard Cite

Abstract-This paper reports a MEMS microforce sensor with a novel configuration of bulk micromachined differential triplate comb drives that overcomes the difficulty of electrically isolating the two stationary capacitor comb sets in bulk micromachining. A high-yield fabrication process using deep-reactive ion etching (DRIE) on silicon-on-insulator (SOI) wafers and only three lithographic masks was utilized to construct the high aspect ratio devices. The process features dry release of both suspended structures and the entire device in order to protect fragile components.The sensor has a high sensitivity (1.35 mV N), good linearity ( 4%), and a large bandwidth (7.8 kHz), and is therefore well suited for characterizing flight behavior of fruit flies (Drosophila melanogaster). The technique allows for the instantaneous measurement of flight forces, which result from a combination of aerodynamic forces and inertial forces generated by the wings, and demonstrates a novel experimental paradigm for exploring flight biomechanics in the fruit fly. The average lift force is determined to be 9.3 N ( 2.3 N),whichisintherange of typical body weights of fruit flies. The potential impact of this research extends beyond gathering flight data on Drosophila melanogaster by demonstrating how MEMS technology can be used to provide valuable tools for biomechanical investigations.[1208]Index Terms-Capacitive sensor, deep-reactive ion etching (DRIE) on silicon-on-insulator (SOI), dice free dry release, differential triplate comb drive, Drosophila melanogaster, fruit flies, high aspect ratio, microforce sensing.

show abstract

Section: Mems Microforce Sensingmentioning

confidence: 99%

“…For example, researchers have considered cockroaches [1], [2], crickets [3], and earthworms [4] to guide the design of small autonomous microsystems. Over the past few years, the flight behavior of small insects has attracted interest for the development of flying microrobotic systems [5], [6].…”

Section: Introductionmentioning

confidence: 99%

Characterizing fruit fly flight behavior using a microforce sensor with a new comb-drive configuration

Sun

Fry

Potasek

et al. 2005

J. Microelectromech. Syst.

128

View full text Add to dashboard Cite

show abstract

“…We designed a three-layer, two-way valve that was made using a MEMS batch fabrication process [5]. Two of these devices need to be packaged together to form one useful four-way valve for each actuator.…”

Section: Micro Valvesmentioning

confidence: 99%

“…Two of these devices need to be packaged together to form one useful four-way valve for each actuator. The design consisted of a passively closed orifice valve that used a TiNi actuator to open the orifice [5].…”

Section: Micro Valvesmentioning

confidence: 99%