The Second Materials Research Society of Thailand International Conference 2020
DOI: 10.1063/5.0023044
|View full text |Cite
|
Sign up to set email alerts
|

CrAlN film hardness uniformity affected by nitrogen content

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2

Citation Types

0
1
0

Year Published

2022
2022
2024
2024

Publication Types

Select...
3

Relationship

0
3

Authors

Journals

citations
Cited by 3 publications
(2 citation statements)
references
References 12 publications
0
1
0
Order By: Relevance
“…Figure 2 shows the XRD patterns of CrAlN and CrAlBN coatings. It can be found that the position of the diffraction peak of CrAlN coating appears between the peaks of standard AlN (PDF#46-1200) and CrN (PDF#11-0065) with higher intensity, forming a metastable fcc-NaCl type structure of CrAlN, which is consistent with previous results [44,45].…”
Section: Composition Structure and Morphologysupporting
confidence: 90%
“…Figure 2 shows the XRD patterns of CrAlN and CrAlBN coatings. It can be found that the position of the diffraction peak of CrAlN coating appears between the peaks of standard AlN (PDF#46-1200) and CrN (PDF#11-0065) with higher intensity, forming a metastable fcc-NaCl type structure of CrAlN, which is consistent with previous results [44,45].…”
Section: Composition Structure and Morphologysupporting
confidence: 90%
“…As the nitrogen pressure increases, there is an increase in N content within the coating; Al content first rises from 20.03 at.% to 23.22 at.%, then declines to 18.60 at.%; Cr content initially falls from 33.10 at.% to 26.56 at.%, then climbs to 30.21 at.%; the Al/Cr ratio first rises, then falls. These variations are primarily attributed to the increased collision probability of Cr and Al ions with nitrogen due to higher nitrogen pressures, significantly impacting the film deposition process through plasma physics kinetics and surface diffusion kinetics [20,21]. In particular, at a nitrogen pressure of 3.0 Pa, substituting larger Al atoms for Cr atoms in the lattice decreases the Cr proportion and increases the Al proportion, raising the Al/Cr ratio.…”
Section: Morphology and Structure Of The Coatingsmentioning
confidence: 99%