Cracking-assisted photolithography for mixed-scale patterning and nanofluidic applications

Kim, Minseok; Ha, Dogyeong; Kim, Taesung

doi:10.1038/ncomms7247

Cited by 96 publications

(107 citation statements)

References 29 publications

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“…Generating controllable cracks has been reported before . The single crack in our work is obtained by strategically positioning stress focusing V‐notch features.…”

Section: Resultsmentioning

confidence: 99%

Single‐Crack‐Activated Ultrasensitive Impedance Strain Sensor

Yang

Zhang

et al. 2018

Adv Materials Inter

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A development of single-crack-activated impedance strain sensors with unprecedented sensitivity is demonstrated first. The gauge factor of the device is beyond 10 8 in 10 −4 strain range in comparison with the reported highest gauge factor 1.5 × 10 5 within 6e-1 strain range, and the displacement sensitivity is 1.6 MΩ nm −1 . The extremely high sensitivity is attributed to the transition region which has never been studied before. Multiplecrack-based sensors, however, cannot work in the transition region due to complicated interaction among cracks, which essentially limits their sensitivity. Additionally, studying a precisely controllable single crack rather than multiple cracks is favorable for excluding other factors such as crack spacing, difference among cracks, and interaction among cracks, simplifying the model and facilitating better understanding of the underlying mechanism of the device. The device can satisfy requirements of mechanical flexibility, durability, and repeatability. In addition, the device developed is capable of measuring displacement in nanometers range or force in tens of nanonewton range, and has the potential to be applied in various fields, such as specific biomolecular recognition.

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“…Generating controllable cracks has been reported before . The single crack in our work is obtained by strategically positioning stress focusing V‐notch features.…”

Section: Resultsmentioning

confidence: 99%

Single‐Crack‐Activated Ultrasensitive Impedance Strain Sensor

Yang

Zhang

et al. 2018

Adv Materials Inter

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“…In 2015, Kim et al reported an alternative technique for fabricating PDMS nanofluidic devices based on another type of materials failure—cracks . Cracks are often considered unfavorable especially in micro‐/nanofabrication, but have been actively utilized to form micro‐/nanopatterns sometimes.…”

Section: Materials and Methods For Fabricating Nanofluidic Devicesmentioning

confidence: 99%

Section: Materials and Methods For Fabricating Nanofluidic Devicesmentioning

confidence: 99%

Nanofluidics: A New Arena for Materials Science

2017

Advanced Materials

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A significant growth of research in nanofluidics is achieved over the past decade, but the field is still facing considerable challenges toward the transition from the current physics-centered stage to the next application-oriented stage. Many of these challenges are associated with materials science, so the field of nanofluidics offers great opportunities for materials scientists to exploit. In addition, the use of unusual effects and ultrasmall confined spaces of well-defined nanofluidic environments would offer new mechanisms and technologies to manipulate nanoscale objects as well as to synthesize novel nanomaterials in the liquid phase. Therefore, nanofluidics will be a new arena for materials science. In the past few years, burgeoning progress has been made toward this trend, as overviewed in this article, including materials and methods for fabricating nanofluidic devices, nanofluidics with functionalized surfaces and functional material components, as well as nanofluidics for manipulating nanoscale materials and fabricating new nanomaterials. Many critical challenges as well as fantastic opportunities in this arena lie ahead. Some of those, which are of particular interest, are also discussed.

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“…However, some examples of nanofluidic experiments were performed in extremely simple bottom‐up synthesized structures. These include nanochannels obtained by exploiting the cracking patterns of polymers upon tensile stresses, unorganized nanoporous matrices, inorganic, carbon nanotube membranes and hollow nanowire arrays . Although these methods are very affordable they still have some major drawbacks.…”

Section: Introductionmentioning

confidence: 99%

Ionic Diffusion, Nanoparticle Formation and Trapping Within Sol‐Gel Made Pillared Planar Nanochannels in a Simple Microfluidic Device

2020

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Efforts to obtain widespread applications in the field of nanofluidics are increasing in intensity in recent years. However, high cost production of nanofluidic devices through the commonly used nanofabrication technologies and the incomplete understanding of solute confinement is still delaying the development of reliable, reproducible and affordable nanofluidic tools. The concentration of species and their diffusion dynamics are strongly influenced by the nanostructure architecture and surface chemistry. Testing a large number of known geometries and surface characteristics has not been possible due to limitations in fabrication procedures. Here, we try to overcome these fabrication difficulties by making the production of large scale nanofluidic devices more viable. We use an alternative bottom‐up method based on supramolecular self‐assembly and sol‐gel chemistry to produce and integrate controlled ceramic nanoporous Pillar Planar Nanochannels (PPN) within microfluidic devices. The system provides a way to easily analyze the diffusion and reaction of species in the aforementioned nanochannels. We show how to extract the nano‐confined concentration and diffusion speed without requiring any expensive analysis instrument. Subsequently, large data sets can be obtained due to the affordability of the presented nanostructure and the ease of its analysis. Moreover, since PPNs have a periodical and regular geometry the obtained data can be compared with simulations, allowing for a better description of the nanoconfined behavior of species.

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Cracking-assisted photolithography for mixed-scale patterning and nanofluidic applications

Cited by 96 publications

References 29 publications

Single‐Crack‐Activated Ultrasensitive Impedance Strain Sensor

Single‐Crack‐Activated Ultrasensitive Impedance Strain Sensor

Nanofluidics: A New Arena for Materials Science

Ionic Diffusion, Nanoparticle Formation and Trapping Within Sol‐Gel Made Pillared Planar Nanochannels in a Simple Microfluidic Device

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