Crack-free and reliable lithographical patterning methods on PDMS substrate

Chou, N. J.; Jeong, Jinmo; Kim, Sohee

doi:10.1088/0960-1317/23/12/125035

Cited by 35 publications

(32 citation statements)

References 21 publications

(27 reference statements)

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“…Dozens of methods have been developed to avoid cracking during drying. Those methods are mostly achieved in four ways: (i) enhancing the strength of the body, (ii) releasing or reducing the capillary stress, (iii) avoiding the substrate constraint, and (iv) combining at least two ways mentioned above . Some methods are usually accomplished by adding polymeric binders, surfactants or soft particles into the suspensions.…”

Section: Introductionmentioning

confidence: 99%

Effect of surrounding polydimethylsiloxane frame and substrate on drying behavior of aqueous alumina suspensions

Jiao

Han

et al. 2018

Int J Applied Ceramic Tech

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The drying behavior of aqueous alumina suspensions surrounded with and without polydimethylsiloxane (PDMS) frames was studied. The capillary stress generated in the bodies was measured in situ using a cantilever deflection method. The relationship between the capillary stress and the formation of cracks was discussed. Compared with the suspensions dried without surrounding PDMS frames, the drying rates of the suspensions were significantly decreased by the surrounding PDMS frames. By drying a suspension on a strong hydrophilic substrate, the PDMS frame hardly reduced the capillary stress. When drying the suspension on a hydrophobic or weak hydrophilic substrate, the elastic deformation of thick PDMS frames could effectively release the capillary stress and therefore crack‐free ceramic green bodies could be obtained.

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Section: Introductionmentioning

confidence: 99%

Effect of surrounding polydimethylsiloxane frame and substrate on drying behavior of aqueous alumina suspensions

Jiao

Han

et al. 2018

Int J Applied Ceramic Tech

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“…Next, parylene in a thickness of 400 nm was deposited on the PDMS substrate using low-pressure chemical vapor deposition (LPCVD) (PDS 2010, Specialty Coating Systems, Indianapolis, IN, USA). Then, parylene on PDMS was etched using O 2 plasma 50 W for 5 min so that the majority of parylene on the PDMS surface was removed and only a small portion of parylene remained in the porous structures of PDMS [15,17]. Lastly, after separation of pc-PDMS from the silicon wafer, it was annealed for 2 h at 200 °C in a vacuum oven (OV-11, JEIOTECH, Seoul, Korea).…”

Section: Methodsmentioning

confidence: 99%

“…As PDMS has a porous surface structure, it exhibits properties such as high gas permeability and high water absorption [14,16,17,18,19]. Pc-PDMS can be formed as the particles of parylene in a gaseous state are trapped only in the porous structure of the PDMS surface after etching the majority of the parylene deposited conformally on the PDMS surface [17]. Pc-PDMS is proved to preserve the inherent beneficial mechanical properties of PDMS, such as elasticity and flexibility, and to lower the water absorption better than native PDMS [15].…”

Section: Introductionmentioning

confidence: 99%

“…Pc-PDMS is proved to preserve the inherent beneficial mechanical properties of PDMS, such as elasticity and flexibility, and to lower the water absorption better than native PDMS [15]. The latter is due to the fact that parylene has a lower water absorption than native PDMS, being suitable as a substrate for implantable electrodes [13,14,15,17]. However, water absorption into pc-PDMS is also inevitable as the electrodes are based on polymeric materials, accompanying the decline in durability and impedance magnitude.…”

Section: Introductionmentioning

confidence: 99%

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Annealing Effects of Parylene-Caulked Polydimethylsiloxane as a Substrate of Electrodes

Jeong

Chou

Lee

et al. 2016

Sensors

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This paper investigates the effects of annealing of the electrodes based on parylene-caulked polydimethylsiloxane (pc-PDMS) in terms of mechanical strength and long-term electrical property. Previously, the electrodes based on pc-PDMS showed a better ability to withstand in vivo environments because of the low water absorption and beneficial mechanical properties of the substrate, compared to native PDMS. Moreover, annealing is expected to even strengthen the mechanical strength and lower the water absorption of the pc-PDMS substrate. To characterize the mechanical strength and water absorption of the annealed pc-PDMS, tensile tests were carried out and infrared (IR) spectra were measured using Fourier transform infrared spectroscopy over a month. The results showed that annealed pc-PDMS had higher mechanical strength and lower water absorption than non-annealed pc-PDMS. Then, electrochemical impedance spectroscopy was measured to evaluate the electrical stability of the electrodes based on annealed pc-PDMS in phosphate-buffered saline solution at 36.5 °C. The impedance magnitude of the electrodes on annealed pc-PDMS was twice higher than that of the electrodes on non-annealed pc-PDMS in the initial days, but the impedance magnitude of the electrodes based on two different substrates converged to a similar value after eight months, indicating that the annealing effects disappear after a certain period of time in a physiological environment.

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“…1(a)). 25 A positive photoresist (AZ9260, MicroChemicals, Ulm, Germany) in a thickness of 10 lm was patterned to create the electrode traces and pads. Then, the developed photoresist pattern was reflowed at 130 C for 90 s on a hotplate.…”

mentioning

confidence: 99%

Large-sized out-of-plane stretchable electrodes based on poly-dimethylsiloxane substrate

Chou

Lee

Kim

2014

Applied Physics Letters

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This paper describes a reliable fabrication method of stretchable electrodes based on poly-dimethylsiloxane (PDMS) substrate. The electrode traces and pads were formed in out-of-plane structures to improve the flexibility and stretchability of the electrode array. The suspended traces and pads were attached to the PDMS substrate via parylene posts that were located nearby the traces and under the pads. As only conventional micro-electro-mechanical systems techniques were used, the out-of-plane electrode arrays were clearly fabricated at wafer level with high yield and reliability. Also, bi-layer out-of-plane electrodes were formed through additional fabrication steps in addition to mono-layer out-of-plane electrodes. The mechanical characteristics such as the stretchability, flexibility, and foldability of the fabricated electrodes were evaluated, resulting in stable electrical connection of the metal traces with up to 32.4% strain and up to 360° twist angle over 25 mm. The durability in stretched condition was validated by cyclic stretch test with 10% and 20% strain, resulting in electrical disconnection at 8600 cycles when subjected to 20% strain. From these results, it is concluded that the proposed fabrication method produced highly reliable, out-of-plane and stretchable electrodes, which would be used in various flexible and stretchable electronics applications.

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Crack-free and reliable lithographical patterning methods on PDMS substrate

Cited by 35 publications

References 21 publications

Effect of surrounding polydimethylsiloxane frame and substrate on drying behavior of aqueous alumina suspensions

Effect of surrounding polydimethylsiloxane frame and substrate on drying behavior of aqueous alumina suspensions

Annealing Effects of Parylene-Caulked Polydimethylsiloxane as a Substrate of Electrodes

Large-sized out-of-plane stretchable electrodes based on poly-dimethylsiloxane substrate

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