(Cr,Al)ON Deposited by Hybrid dcMS/HPPMS: A study on Incorporation of Oxygen

Brögelmann, Tobias; Bobzin, Kirsten; Kruppe, N.C.; Carlet, M.

doi:10.1016/j.surfcoat.2019.04.066

Cited by 12 publications

(11 citation statements)

References 25 publications

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“…The lowest reported value to obtain a pure corundum phase was Cr/(Cr + Al) = 0.3 [178]. There are also several reports on the existence of minor amorphous phases [175,178,179].…”

Section: From (Cral)n or (Alcr)n To Oxynitride And Oxide Coatingsmentioning

confidence: 96%

“…It was shown that oxynitride and oxide coatings (alpha and cubic crystal modifications) have a potential for use in various tribological applications and for oxidation protection [166][167][168][169][170], and moreover, even for use in solar absorbers [171]. Both vacuum arc deposition and various sputtering methods, including HiPIMS processes and hybrid processes (HiPIMS plus DC magnetron sputtering), were applied to investigate coatings of the types (AlCr)ON and (AlCr)O [23,[172][173][174][175].…”

Section: From (Cral)n or (Alcr)n To Oxynitride And Oxide Coatingsmentioning

confidence: 99%

“…In the context of oxynitrides, it should be noted that in many industrialised nitride deposition processes, residual amounts of oxygen (up to several at.%) are incorporated [111,122,146,172,175,176]. The effects of substrate rotation additionally influence details of the structure due to the changing position in the chamber relative to the source [132].…”

Section: From (Cral)n or (Alcr)n To Oxynitride And Oxide Coatingsmentioning

confidence: 99%

“…The deposition of AlCr-based oxynitride and oxide coatings through sputtering has been approached using both RF-sputtering [173,179,182,183] as well as HiPIMS techniques [170,175]. Systematic investigations of RF-sputtered Al-Cr-O-N coatings have shown that, depending on the gas composition (Ar, O 2 , N 2 ), the total gas pressure and the Al/Cr ratio, coatings with a single phase or mixed phase are grown.…”

Section: Sputtering: Oxynitride and Oxide Coatingsmentioning

confidence: 99%

“…The coating composition and structure with a given sputtering target composition are strongly dependent on the sputtering mode. Different Al/Cr ratios, deposition rates, and oxygen contents were reported for the comparison of DC magnetron, HiPIMS and a hybrid mode employing both [175]. Thick oxynitride coatings, thicker than 35 µm, were deposited by gas-flow sputtering [170].…”

Section: Sputtering: Oxynitride and Oxide Coatingsmentioning

confidence: 99%

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Quo Vadis: AlCr-Based Coatings in Industrial Applications

et al. 2021

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AlCr-based hard nitride coatings with different chemical compositions and architectures have been successfully developed and applied over the last few decades. Coating properties are mainly influenced by deposition conditions and the Al/Cr content. The fcc structure is dominant for an Al-content up to Al0.7Cr0.3N and is preferred for most cutting applications. Different (AlCrX)N alloying concepts, including X = Si, W, B, V, have been investigated in order to enhance oxidation resistance and wear behaviour and to provide tribological properties. AlCr-based oxynitrides and even pure oxides (Al1−xCrx)2O3 with different crystalline structures have been explored. Multi- and nanolayered coatings within the AlCr materials system, as well as in combination with (TiSi)N, for example, have also been implemented industrially. The dominant deposition technology is the vacuum arc process. Recently, advanced high-power impulse magnetron sputtering (HiPIMS) processes have also been successfully applied on an industrial scale. This paper describes basic coating properties and briefly addresses the main aspects of the coating processes as well as selected industrial applications.

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“…The lowest reported value to obtain a pure corundum phase was Cr/(Cr + Al) = 0.3 [178]. There are also several reports on the existence of minor amorphous phases [175,178,179].…”

Section: From (Cral)n or (Alcr)n To Oxynitride And Oxide Coatingsmentioning

confidence: 96%

Section: From (Cral)n or (Alcr)n To Oxynitride And Oxide Coatingsmentioning

confidence: 99%

Section: From (Cral)n or (Alcr)n To Oxynitride And Oxide Coatingsmentioning

confidence: 99%

Section: Sputtering: Oxynitride and Oxide Coatingsmentioning

confidence: 99%

Section: Sputtering: Oxynitride and Oxide Coatingsmentioning

confidence: 99%

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Quo Vadis: AlCr-Based Coatings in Industrial Applications

et al. 2021

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Specific heat capacity of chromium aluminum based nitride and oxynitride hard coatings

Bobzin,

Kalscheuer,

Carlet

et al. 2024

Materialwissenschaft Werkst

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In simulation for machining processes, temperature dependent properties and their exact specification are important for application oriented results. For calculation of coated tools and components, interest in thermophysical properties of hard coatings is increasing. A methodical approach is used to measure the specific heat capacity of nitride and oxynitride hard coatings deposited by physical vapor deposition. The coating is converted into powdery state and measured by differential scanning calorimetry. Heat capacities for Cr44Al5N51 and two oxynitride Cr40Al5O18N37 and Cr44Al8O28N21 coatings were measured from T=200 °C to T=900 °C, technically relevant in tribological applications and manufacturing technology. The measured heat capacities showed reproducible results between cp ≈0.38 J/gK and cp ≈0.78 J/gK and dependency on the chemical composition of the coatings. The coating with highest non‐metal to metal ratio exhibited the highest heat capacity. The coating with highest oxygen content and lowest non‐metal to metal ratio showed the lowest heat capacity. Hard coatings and their thermophysical properties can affect heat transfer in industrial processes. Knowledge of these properties is necessary for process control by temperature sensor coatings or temperature dependent simulations. With measured values of heat capacities of physically vapor deposited hard coatings separated from the substrate, coatings can be adapted for use in application.

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