2019
DOI: 10.1515/nanoph-2019-0153
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Coupling-enhanced dual ITO layer electro-absorption modulator in silicon photonics

Abstract: Electro-optic signal modulation provides a key functionality in modern technology and information networks. Photonic integration has enabled not only miniaturizing photonic components, but also provided performance improvements due to co-design addressing both electrical and optical device rules. However, the millimeter-to-centimeter large footprint of many foundry-ready photonic electro-optic modulators significantly limits on-chip scaling density. To address these limitations, here we experimentally demonstr… Show more

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Cited by 53 publications
(26 citation statements)
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References 57 publications
(100 reference statements)
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“…In epitaxial CdO grown on sapphire, the effect is prominent up to carrier densities of 3.3 × 10 20 cm −3 , as shown in previous studies . We deposited our CdO films on fused silica substrates keeping in mind practical device‐applications where the films are usually deposited on an oxide (SiO 2 , Al 2 O 3 , or HfO 2 ) or on silicon . This led to the growth of polycrystalline CdO films (Figure S1.2, Supporting Information), which increased the Drude‐damping caused by scattering across grain boundaries, compared to epitaxial layers grown on sapphire or magnesium oxide .…”
Section: Resultsmentioning
confidence: 69%
“…In epitaxial CdO grown on sapphire, the effect is prominent up to carrier densities of 3.3 × 10 20 cm −3 , as shown in previous studies . We deposited our CdO films on fused silica substrates keeping in mind practical device‐applications where the films are usually deposited on an oxide (SiO 2 , Al 2 O 3 , or HfO 2 ) or on silicon . This led to the growth of polycrystalline CdO films (Figure S1.2, Supporting Information), which increased the Drude‐damping caused by scattering across grain boundaries, compared to epitaxial layers grown on sapphire or magnesium oxide .…”
Section: Resultsmentioning
confidence: 69%
“…channel crosstalk (Figure 3f). Physically this range corresponds to a small (ΔT = 0.54 K) temperature change that the waveguide index must tolerate to keep within the selected attenuation [21][22][23] or electro-absorption modulators [19,20], and also to <10 μm-short 2 × 2 directional couplers [56] allowing for improved N-scaling of OFFT-based convolutions. GPU processing times obtained by fitting runtime.…”
Section: Resultsmentioning
confidence: 99%
“…In the latter a digitalto-analog converter (DAC) may be needed front-end, and an ADC back-end. Next, the dot-product multiplication to be performed as part of core of the tensor processor can be achieved in a multitude of options such as via electro-optic weighting by controlling the amplitude such as via an electro-absorption modulator [19,20], and phase-shifter using an Mach Zehnder interferometer (MZI) [16,[21][22][23], or via photonic nonvolatile memory such as enabled by phasechange-material weighted states [24], or all-optically [25]. Each of these options can be performed non-resonantly (i.e.…”
Section: Introductionmentioning
confidence: 99%
“…Our material property findings for ITO in this study are indeed far-ranging beyond photoabsorption, but can further be used to electro-optic devices as well [53][54][55][56]. For instance, the optical index can be tuned electrostatically via chancing the free carrier concentration leading to electro-optic modulators, both for electro-absorption [57][58][59], but also used in interferometric schemes [60][61][62] to demonstrate high-performance…”
Section: Impact Of Thickness Of Ito Window Layer In the Performance Cmentioning
confidence: 95%