1988
DOI: 10.1116/1.584148
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Coulomb interactions in particle beams

Abstract: A comprehensive theory has been developed to describe all manifestations of Coulomb interactions between charged particles in low- and medium-density nonrelativistic beams, e.g., as found in electron beam pattern generators and scanning electron microscopes. A survey is given of the analytical prescriptions for the calculation of the Boersch effect, trajectory displacement effect, and space-charge effect occurring in the drift space of a column. The theory is applied to the IBM EL3 and the Perkin–Elmer aeble 1… Show more

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Cited by 77 publications
(49 citation statements)
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References 15 publications
(27 reference statements)
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“…The coefficient of thermal expansion ␣ f and the biaxial modulus E f /(1Ϫ f ) can be determined simultaneously, since the temperature dependence on the stress, for the same film deposited on two different substrates is known. They can be readily obtained by solving two equations 5,15,16,19,20 of the form given in Eq. ͑2͒, or by plotting two E f /(1Ϫ f ) vs ␣ f curves to find their intersection.…”
Section: B Coefficient Of Thermal Expansion and Biaxial Modulus Measmentioning
confidence: 99%
See 1 more Smart Citation
“…The coefficient of thermal expansion ␣ f and the biaxial modulus E f /(1Ϫ f ) can be determined simultaneously, since the temperature dependence on the stress, for the same film deposited on two different substrates is known. They can be readily obtained by solving two equations 5,15,16,19,20 of the form given in Eq. ͑2͒, or by plotting two E f /(1Ϫ f ) vs ␣ f curves to find their intersection.…”
Section: B Coefficient Of Thermal Expansion and Biaxial Modulus Measmentioning
confidence: 99%
“…For example, using nanoindentation and Brillouin scattering, Jiang et al determined E and separately for a-C:H ͑Ref. 8͒ and a-Si:H. 9 The CTEs of a-Si:H, 15 16 Al, 21 and Cr, 22 have been obtained using a technique, thermally induced bending ͑TIB͒, based on the determination of the curvature of the filmϩsubstrate composite as a function of temperature. Recently, x-ray diffraction 23 and dilatometry 24 have also been used to determine the thermal expansion coefficients of some metallic films.…”
Section: Introductionmentioning
confidence: 99%
“…For neutral plasmas, the general agreement is that the Debye length should be used as a cutoff parameter. For non-neutral plasmas or charged-particle beams, Jansen indicates that it is more realistic to use the mean interparticle distance [16]. In the accelerator community a similar argument is often followed (see, for example, Le Duff [9] and Struckmeier [21]).…”
Section: Appendix Dmentioning
confidence: 99%
“…We have examined the derivation of the damping and diffusion coefficients in the Fokker-Planck formulation [16,17] in order to estimate dP͞dt for multiple collisions. The details depend on the particular distribution f͑x, y͒ used, but, apart from a numerical constant depending on the distribution, we find that Eq.…”
Section: Structure Of the Shell And Effect Of Multiple Collisionsmentioning
confidence: 99%
“…The energy resolution for most measurements was 0.7 eV fwhm (full width at half maximum). The structured regions at the onset of inner shell excitation were recorded at higher resolution ($0.55 eV fwhm) by reducing the gun current to $4 lA, to reduce resolution degradation associated with the Boersch (space charge) effect [26]. The gas phase spectra of most materials were obtained by placing $0.1 g in a metal tube directly attached to the collision cell.…”
Section: Gas Phase Measurements By Iseelsmentioning
confidence: 99%