Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI
DOI: 10.1109/asmc.2003.1194488
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Cited by 6 publications
(2 citation statements)
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“…Jacobs stated that by reducing bottleneck process stagnation contributes greatly to the reduction of cycle time [28]. Both Dietrich and Maynard further this concept by stating the solution of a bottleneck is not simply tool redundancy, but rather lie in tool and facility understanding [14], [38]. These metrics are based on a deep understanding of HVSF facilities and simply do not translate well to the realities of MT-HMLV facilities.…”
Section: Hvsf Global Metricsmentioning
confidence: 93%
“…Jacobs stated that by reducing bottleneck process stagnation contributes greatly to the reduction of cycle time [28]. Both Dietrich and Maynard further this concept by stating the solution of a bottleneck is not simply tool redundancy, but rather lie in tool and facility understanding [14], [38]. These metrics are based on a deep understanding of HVSF facilities and simply do not translate well to the realities of MT-HMLV facilities.…”
Section: Hvsf Global Metricsmentioning
confidence: 93%
“…A global metric centered on process speed is found in the process step named lithography ( Jacobs et al, 2001). Process step limitations to throughput is not overcome by simple process station redundancy but rather by understanding the scope of each processes or task required (Dietrich, 2004;Maynard et al, 2003) especially in highly flexible facilities. Yet most process time metrics other than lot moves have limited theoretical backing.…”
Section: High Volume Facilities Metricsmentioning
confidence: 99%