Cost-Effective, Transfer-Free, Flexible Resistive Random Access Memory Using Laser-Scribed Reduced Graphene Oxide Patterning Technology

Abstract

Laser scribing is an attractive reduced graphene oxide (rGO) growth and patterning technology because the process is low-cost, time-efficient, transfer-free, and flexible. Various laser-scribed rGO (LSG) components such as capacitors, gas sensors, and strain sensors have been demonstrated. However, obstacles remain toward practical application of the technology where all the components of a system are fabricated using laser scribing. Memory components, if developed, will substantially broaden the application space of low-cost, flexible electronic systems. For the first time, a low-cost approach to fabricate resistive random access memory (ReRAM) using laser-scribed rGO as the bottom electrode is experimentally demonstrated. The one-step laser scribing technology allows transfer-free rGO synthesis directly on flexible substrates or non-flat substrates. Using this time-efficient laser-scribing technology, the patterning of a memory-array area up to 100 cm(2) can be completed in 25 min. Without requiring the photoresist coating for lithography, the surface of patterned rGO remains as clean as its pristine state. Ag/HfOx/LSG ReRAM using laser-scribing technology is fabricated in this work. Comprehensive electrical characteristics are presented including forming-free behavior, stable switching, reasonable reliability performance and potential for 2-bit storage per memory cell. The results suggest that laser-scribing technology can potentially produce more cost-effective and time-effective rGO-based circuits and systems for practical applications.

A Graphene-Based Resistive Pressure Sensor with Record-High Sensitivity in a Wide Pressure Range

“…Figure 1c shows the fabrication process of the LSG pressure sensor. The LSG film patterning is based on the reduction of graphene oxide (GO) using DVD laser-scribing function15161718. Unlike the dense GO films, the LSG is composed of loosely stacked graphene layers19.…”

Perspective on photonic memristive neuromorphic computing

“…Graphene Oxide (GO) is a single monomolecular layer of graphite with several oxygen-containing groups, a strongly hydrophilic intermediate product to chemically form graphene. It has attracted attention among cross-discipline researchers due to its tuneable electrical and optical properties dynamically controllable by the reduction of oxygen-containing groups manipulating through either chemical [88], or physical reduction methods such as laser exposure [89,90]. Tuning of the nonlinear absorption Reproduced from ref.…”

In Situ Integration of SERS Sensors for On‐Chip Catalytic Reactions

“…Typically, laser‐scribed graphene oxide has been commonly applied to make electronic devices for its good mechanical property, high electrical conductivity (up to 1738 S m −1 ), and high surface area (up to 1520 m 2 g −1 ) . For instance, Ren et al utilized the facile laser‐scribing method for preparing various graphene electronic devices, such as random‐access memory, earphones, and strain sensors, revealing great potential for cost‐effective and high‐efficiency manufacturing. In our recent work, the laser‐scribing method has been employed to fabricate graphene biochips that presented an excellent DNA detection performance .…”