Cost Effective Laser Structuration of Optical Waveguides on Thin Glass Interposer

Abstract

In order to enhance electro-optical system-inpackage capabilities for silicon photonics, a cost effective fabrication process for optical waveguides integration on thin glass substrate interposer is demonstrated. First, a femtosecond laser ablation coupled with a hydrofluoric acid etching is developed to create microgrooves at the glass surface. Second, a dry film lamination followed by chemical mechanical planarization is achieved to define surface optical waveguides by filling the microchannels. Physical characterizations of the fabricated waveguides are performed using optical and scanning electron microscopy. Finally, optical mode profile and loss characterizations confirm the optical functionality of waveguides which prove to be multimodal at 1550 nm.