Corrosion stability of vapour-deposited transition metal phosphides at high temperature

Dual-source chemical vapour deposition of titanium(III) phosphide from titanium tetrachloride and tristrimethylsilylphosphine

“…the choice of substrate for the deposition process [5]. Lower temperature CVD reactions utilising both single-source [6] and dual-source approaches [7] from the reaction of TiCl 4 and PH 2 R (R = cyclohexyl or t-butyl) have been investigated.…”

Chemical vapour deposition of group Vb metal phosphide thin films

“…10 It has also been shown that the reaction of a metal chloride with a primary organophosphine (RPH 2 ) provides a readily accesible low temperature route to metal phosphides [11][12][13][14] and recently this has been demonstrated for the production of -TaP from the reaction of TaCl 5 with Cy hex PH 2 . 15 We have shown that TiP films can be made from the APCVD reaction of TiCl 4 and Cy hex PH 2 . 12 Here we report the first APCVD study of group Vb phosphides from the reaction of volatile halide precursors and Cy hex PH 2 .…”

“…2 It has been used as a diffusion barrier layer in semiconductor devices. 3 Similarly, vanadium(III) phosphide (VP) is a hard, metallic conductor.…”

“…8,9 Thin films of several transition metal phosphides have been synthesised from the reaction of metal chlorides with PCl 3 and hydrogen at temperatures above 850 C. 2 The drawback with these methods are the high process temperatures required and the phosphorus analogue of ammonia, phosphine (PH 3 ), is a pyrophoric, extremely toxic gas. Winter et al have demonstrated a low pressure route (400 -600 C) to thin NbP films using a single-source precursor formed from the reaction of niobium(V) chloride and cyclohexylphosphine (Cy hex PH 2 ) but this precursor showed significant decomposition at its sublimation temperature.…”

Refinement of hypereutectic Al–Si alloy by a new Al–Zr–P master alloy

“…of the phosphides have been done, although some phosphides have some good physical and chemical properties. For example, ZrP are such transition metal phosphides, which are of much interest in view of its high chemical and thermodynamic stability even at elevated temperatures [15][16][17][18][19][20][21]. ZrP shows relatively strong corrosion resistance of acid solutions, for example Hydrochloride.…”