2018
DOI: 10.1016/j.sab.2018.11.002
|View full text |Cite
|
Sign up to set email alerts
|

Corrigendum to “Depth profile analyses with sub 100-nm depth resolution of a metal thin film by femtosecond - laser ablation - inductively coupled plasma - time-of-flight mass spectrometry” Spectrochimica Acta Part B: Atomic Spectroscopy 149 (2018) 176–183

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2

Citation Types

0
2
0

Year Published

2019
2019
2022
2022

Publication Types

Select...
2

Relationship

0
2

Authors

Journals

citations
Cited by 2 publications
(2 citation statements)
references
References 0 publications
0
2
0
Order By: Relevance
“…Spatial proling using LA-ICPMS needs optimized laser parameters such as wavelength, pulse width, beam shape and uence for precise and accurate measurements. [12][13][14][15][16][17][18][19][20][21] Past studies [12][13][14][15][16][17][18][19][20][21] indicate that LA-ICPMS systems with shorter wavelengths (UV or deep UV region) are preferred for stoichiometric ablation. Hence, 193 nm is a better choice than the other common UV wavelengths viz., 213, 248, and 266 nm (ref.…”
Section: Introductionmentioning
confidence: 99%
“…Spatial proling using LA-ICPMS needs optimized laser parameters such as wavelength, pulse width, beam shape and uence for precise and accurate measurements. [12][13][14][15][16][17][18][19][20][21] Past studies [12][13][14][15][16][17][18][19][20][21] indicate that LA-ICPMS systems with shorter wavelengths (UV or deep UV region) are preferred for stoichiometric ablation. Hence, 193 nm is a better choice than the other common UV wavelengths viz., 213, 248, and 266 nm (ref.…”
Section: Introductionmentioning
confidence: 99%
“…Some SIMS instruments provide excellent spatial resolution but SIMS quantitative performance suffers from severe matrix effects, and ion implantation [7][8][9] . ICP-MS has excellent sensitivities to the trace element level but can suffer from fractionation and interactions between the sample, transportation gas and the plasma [10][11][12] . GD-MS provides good sensitivity to trace elements but also suffers from gas-sample interactions and is limited to large sample sizes.…”
Section: Introductionmentioning
confidence: 99%