“…Spatial proling using LA-ICPMS needs optimized laser parameters such as wavelength, pulse width, beam shape and uence for precise and accurate measurements. [12][13][14][15][16][17][18][19][20][21] Past studies [12][13][14][15][16][17][18][19][20][21] indicate that LA-ICPMS systems with shorter wavelengths (UV or deep UV region) are preferred for stoichiometric ablation. Hence, 193 nm is a better choice than the other common UV wavelengths viz., 213, 248, and 266 nm (ref.…”