Spontaneous
polarization switchable by the externally applied electric
field in ferroelectrics is a crucial feature for its technological
applications; however, the reduction in switchable polarization due
to bipolar electric cycling primarily hampers its potential application
in nonvolatile memory. Among others, electric-field-controlled polarization
recovery would be highly desirable from fundamental and technological
viewpoints. In spite of recent progress in electrically controlled
polarization recovery, polarization reversal behavior in fatigued
and recovered states, associated device resistance change, and repeatability
and reproducibility of fatigue–recovery cycles remain poorly
understood. This study provides an in-depth insight into the recovery
of fatigued polarization by an electric field for epitaxially grown
Pb(Zr0.3Ti0.7)O3 thin film capacitor
with oxide electrodes. Systematic analysis of time- and field-dependent
polarization switching kinetics in pristine, fatigued, and recovered
states using a suitable statistical model enabled the precise extraction
of microscopic switching parameters such as mean characteristic switching
times and effective activation fields. Our results demonstrate that
fatigue and recovery are possibly mediated by domain pinning–depinning
because of defect redistribution and trapping–detrapping of
charges at nonelectroneutral domain walls. In addition, the consecutive
fatigue–recovery cycles elucidate the repeatability and applicability
of electric field controlled polarization recovery in ferroelectric
capacitors.