2004
DOI: 10.1016/j.electacta.2003.12.030
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Correlation of morphology and barrier properties of thin microwave plasma polymer films on metal substrate

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Cited by 55 publications
(44 citation statements)
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“…Generally, conventional silicon nitride and silicon oxynitride films, obtained from inorganic precursors, are analyzed by dynamic SIMS to determine the N, O, and H concentration at interfaces [22][23][24]. Few studies have been published on the use of static SIMS to characterize films obtained from PECVD of organosilicon compounds, such as hexamethyldisiloxane (HMDSO) [25,26] or hexamethyldisilane (HMDS) [27,28]. These investigations are limited to highly organic films and mainly to qualitative purposes.…”
Section: Introductionmentioning
confidence: 99%
“…Generally, conventional silicon nitride and silicon oxynitride films, obtained from inorganic precursors, are analyzed by dynamic SIMS to determine the N, O, and H concentration at interfaces [22][23][24]. Few studies have been published on the use of static SIMS to characterize films obtained from PECVD of organosilicon compounds, such as hexamethyldisiloxane (HMDSO) [25,26] or hexamethyldisilane (HMDS) [27,28]. These investigations are limited to highly organic films and mainly to qualitative purposes.…”
Section: Introductionmentioning
confidence: 99%
“…There is a possibility that substantial levels of moisture may accumulate at the film‐tablet interface, which would have adverse effects on moisture‐sensitive active ingredients. A number of studies, notably Fung and Parrot,22 Klages et al23 and Barranco et al,24 discuss the formation of this water layer at the film‐substrate boundary and correlate it with a reduction in film adhesion for paint‐based films. Okhamafe and York5 and Felton and McGinity6 who investigated the aging of hypromellose, PVA and methyacrylic polymers under elevated RH, attributed the loss of adhesion due to changes in molecular order and build up of internal stress within the coatings.…”
Section: Resultsmentioning
confidence: 99%
“…[30] Further, additional adhesion of the two components via polar interaction was reported in. [31] Similar investigations using plasma polymerisation were carried out concerning the deposition of cyclohexene/hexamethyldisilane on a zinc oxide surface. [32] The objective of the experiments performed in [32] was to produce a graded interfacial layer where one side promotes a strong bond between the polymer and the metal while the other side possesses optimum properties for the attachment of a polymer (organic coating).…”
Section: Methodsmentioning
confidence: 99%