Correlation of Electronic and Microscopic Properties of TiO<sub>x</sub>/Al-based Electron-selective Contacts in Silicon Solar Cells

Titova, Valeriya; Flathmann, Christoph; Seibt, Michael; Schmidt, Jan

doi:10.1109/pvsc40753.2019.8980692

2019 IEEE 46th Photovoltaic Specialists Conference (PVSC) 2019

DOI: 10.1109/pvsc40753.2019.8980692

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Correlation of Electronic and Microscopic Properties of TiO_x/Al-based Electron-selective Contacts in Silicon Solar Cells

Valeriya Titova

Christoph Flathmann

Michael Seibt

et al.

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2023

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“…The aim of this study is to elucidate how composition changes on a nanoscale affect the electronic properties of atomic layer deposition (ALD) grown, n-Si/SiO x /TiO y /Al carrier selective contacts with native SiO x layers. As was previously shown 20,[26][27][28] , solar cells with such contacts exhibit quite poor interface passivation and high series resistance in the as-deposited state. After a low temperature annealing step though, both properties improve considerably, leading to efficiencies of up to 20.3% for the batch of solar cells investigated here 26 and 22.1% for the current record solar cells with SiO x /TiO y based contacts 1 .…”

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Composition and electronic structure of $${\rm SiO}_{\rm x}$$/$${\rm TiO}_{\rm y}$$/Al passivating carrier selective contacts on n-type silicon solar cells

Flathmann

Meyer

Titova

et al. 2023

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Carrier-selective and passivating SiO$$_{\rm x}$$ x /TiO$$_{\rm y}$$ y heterocontacts are an attractive alternative to conventional contacts due to their high efficiency potentials combined with relatively simple processing schemes. It is widely accepted that post deposition annealing is necessary to obtain high photovoltaic efficiencies, especially for full area aluminum metallized contacts. Despite some previous high-level electron microscopy studies, the picture of atomic-scale processes underlying this improvement seems to be incomplete. In this work, we apply nanoscale electron microscopy techniques to macroscopically well-characterized solar cells with SiO$$_{\rm x}$$ x /TiO$$_{\rm y}$$ y /Al rear contacts on n-type silicon. Macroscopically, annealed solar cells show a tremendous decrease of series resistance and improved interface passivation. Analyzing the microscopic composition and electronic structure of the contacts, we find that partial intermixing of the SiO$$_{\rm x}$$ x and TiO$$_{\rm y}$$ y layers occurs due to annealing, leading to an apparent thickness reduction of the passivating SiO$$_{\rm x}$$ x . However, the electronic structure of the layers remains clearly distinct. Hence, we conclude that the key to obtain highly efficient SiO$$_{\rm x}$$ x /TiO$$_{\rm y}$$ y /Al contacts is to tailor the processing such that the excellent chemical interface passivation of a SiO$$_{\rm x}$$ x layer is achieved for a layer thin enough to allow efficient tunneling through the layer. Furthermore, we discuss the impact of aluminum metallization on the above mentioned processes.

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confidence: 64%

Composition and electronic structure of $${\rm SiO}_{\rm x}$$/$${\rm TiO}_{\rm y}$$/Al passivating carrier selective contacts on n-type silicon solar cells

Flathmann

Meyer

Titova

et al. 2023

Sci Rep

Self Cite

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Correlation of Electronic and Microscopic Properties of TiO_x/Al-based Electron-selective Contacts in Silicon Solar Cells

Cited by 1 publication

References 5 publications

Composition and electronic structure of $${\rm SiO}_{\rm x}$$/$${\rm TiO}_{\rm y}$$/Al passivating carrier selective contacts on n-type silicon solar cells

Composition and electronic structure of $${\rm SiO}_{\rm x}$$/$${\rm TiO}_{\rm y}$$/Al passivating carrier selective contacts on n-type silicon solar cells

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Correlation of Electronic and Microscopic Properties of TiOx/Al-based Electron-selective Contacts in Silicon Solar Cells

Cited by 1 publication

References 5 publications

Composition and electronic structure of $${\rm SiO}_{\rm x}$$/$${\rm TiO}_{\rm y}$$/Al passivating carrier selective contacts on n-type silicon solar cells

Composition and electronic structure of $${\rm SiO}_{\rm x}$$/$${\rm TiO}_{\rm y}$$/Al passivating carrier selective contacts on n-type silicon solar cells

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Correlation of Electronic and Microscopic Properties of TiO_x/Al-based Electron-selective Contacts in Silicon Solar Cells