Correlation between the surface quality and the abrasive grains wear in optical glass lapping

Belkhir, Nabil; Bouzid, D.; Herold, Volker

doi:10.1016/j.triboint.2006.05.001

Cited by 24 publications

(11 citation statements)

References 5 publications

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“…Indeed, Belkhira et al [15] linked the roughness with the wear of abrasive grains. Luo et al [16] enumerated different wears from the abrasive grains during the grinding of optical glass and showed the correlation between the glass surface quality and the wear of abrasive grains.…”

Section: Introductionmentioning

confidence: 99%

On Material Removal Regimes for the Shaping of Glass Edges: Force Analysis, Surface Topography and Damage Mechanisms

2008

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Section: Introductionmentioning

confidence: 99%

On Material Removal Regimes for the Shaping of Glass Edges: Force Analysis, Surface Topography and Damage Mechanisms

2008

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“…8 and was approved in our previous work [30]. This influence can be explained by the fact that the grains in contact with the surface create different types of defects leading to its deterioration.…”

Section: Ssd Creationmentioning

confidence: 94%

Characterization of glass surface damaged by alumina abrasive grains

Belkhir

Bouzid

Lakhedari

et al. 2011

Journal of Non-Crystalline Solids

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“…Some research on lapping has recently been initiated, Ioan et al [1] investigated the correlation between the surface quality and the abrasive grains wear in optical-glass lapping, Preston's lapping removal rate equation was applied to analyze the lapping factors. Cong et al [5] studied the effects of factors that influence the lapping removal rate and surface roughness.…”

Section: Introduction To Lapping Processmentioning

confidence: 99%

Improving a lapping process using robust parameter design and run-to-run control

Ning

Bian

Liu

2012

Journal of the Chinese Institute of Industrial Engineers

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Lapping is a critical step of wafer manufacture. Some wafer quality characteristics, such as total thickness variation (TTV) and thickness, are largely determined by lapping. A lapping process has a collection of factors. In practice, some factors are seldom changed once been fixed; while some others are tuned online continuously. We classify the factors into online factors, offline factors, uncontrollable factors, and noises. In this work, we analyze the physical mechanism of lapping factors then conduct experiments to study the lapping process. Offline factors are optimized via the robust parameter design (RPD); online factors are optimized via the double exponential weighted moving average Run-to-Run control. Verifying experiments proved that the RPD and RtR control can help to improve the TTV and the batch-to-batch thickness variation, respectively.

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Correlation between the surface quality and the abrasive grains wear in optical glass lapping

Cited by 24 publications

References 5 publications

On Material Removal Regimes for the Shaping of Glass Edges: Force Analysis, Surface Topography and Damage Mechanisms

On Material Removal Regimes for the Shaping of Glass Edges: Force Analysis, Surface Topography and Damage Mechanisms

Characterization of glass surface damaged by alumina abrasive grains

Improving a lapping process using robust parameter design and run-to-run control

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