2002
DOI: 10.1103/physrevb.66.195211
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Correlation between the results of charge deep-level transient spectroscopy and ESR techniques for undoped hydrogenated amorphous silicon

Abstract: Results of charge deep-level transient spectroscopy ͑DLTS͒ and electron spin resonance ͑ESR͒ measurements on undoped hydrogenated amorphous silicon (a-Si:H͒ clearly demonstrate that a group of gap states with a mean energy of 0.82 eV as observed in charge DLTS experiments for a-Si:H based metal/oxide/ semiconductor structure is the same as the gϭ2.0055 ESR defect ͑the D z component͒. This correlation provides a distinct marker for charge DLTS technique. We obtained a very good fit to spectra obtained on undope… Show more

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Cited by 21 publications
(18 citation statements)
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“…Similarly, the calculated steady state occupied and unoccupied integrated densities of D d (E) are found to be equal to the introduced integrated densities of the negative and neutral dangling bonds, respectively. Moreover, the free-carrier densities calculated by means of the charge-neutrality condition for the amphoteric dangling bonds (D + (E), D 0 (E) and D − (E)) are found to be equal with those calculated by replacing the dangling bonds with the monovalent D a (E) and D d (E) obtained from Equations (8) and (9). Therefore, the D a (E) and D d (E) can successfully replace the amphoteric dangling bonds to treat them exactly in the model simulations.…”
Section: Incorporation Of Amphoteric States For the Dangling Bondsmentioning
confidence: 99%
See 1 more Smart Citation
“…Similarly, the calculated steady state occupied and unoccupied integrated densities of D d (E) are found to be equal to the introduced integrated densities of the negative and neutral dangling bonds, respectively. Moreover, the free-carrier densities calculated by means of the charge-neutrality condition for the amphoteric dangling bonds (D + (E), D 0 (E) and D − (E)) are found to be equal with those calculated by replacing the dangling bonds with the monovalent D a (E) and D d (E) obtained from Equations (8) and (9). Therefore, the D a (E) and D d (E) can successfully replace the amphoteric dangling bonds to treat them exactly in the model simulations.…”
Section: Incorporation Of Amphoteric States For the Dangling Bondsmentioning
confidence: 99%
“…Figures 8(b) and (c) present the D + (E), D 0 (E) and D − (E) distributions calculated for the two free-carrier densities n = 1 × 10 9 and 7 Â 10 9 cm À3 , respectively, which are used for the reconstruction of the experimental spectra of Figure 10 obtained with two different bias light levels. From the above distributions the D a (E) and D d (E) are calculated by means of Equations (8) and (9), which in fact represent the D +/0 and D 0/− levels, respectively. These two transition levels are plotted in Figure 9 (solid and dashed-dotted lines).…”
Section: Reconstruction Of the Experimental Mpc Spectramentioning
confidence: 99%
“…On the basis of previous Q-DLTS experiments [6,8] we have claimed that during initial stage of LS a removal rather than creation of positively charged defects positioned well above midgap takes place. The removal of these defects produces the shift of the Fermi level towards midgap and the decay of dark current and photocurrent.…”
Section: Discussionmentioning
confidence: 98%
“…[8]. The Q-DLTS spectrum of the sample annealed at zero bias voltage (intrinsic type of EDOS) was fitted with the EDOS calculated by the defect-pool model from 1996 [5].…”
Section: Experiments and Simulationmentioning
confidence: 99%
“…According to the defect-pool model by Powell and Deane, 8 10 Q-DLTS measurements were performed on a-Si: H based metal-oxide-semiconductor ͑MOS͒ structures, consisting of a 1-m-thick a-Si: H layer deposited on n ++ crystalline Si. The fabrication method of the MOS structure is described by Durný et al 11 The measurements were carried out using a bias voltage of −3 V, excitation pulses of 6 V, and a rate window of 100 s −1 .…”
mentioning
confidence: 99%