Correlation between rf-sputtering parameters and WO3 sensor response towards ozone

Mechanism of O3 sensing on Cu2O(111) surface: First principle calculations

“…If first devices were mainly based on Sn 2 O sensitive layer [1], nowadays more oxides are used like WO 3 [2,3], ZnO [4], CuO [5,6], etc. Despite their wide success bases on their low cost, their good responses to several gases and their easy implementation in integrated systems, these sensors sin by their lack of selectivity.…”

“…In particular we have studied WO 3 , n-type semiconductor to detect O 3 , NO x and CO [8,9]. In the continuity of these works we first have been interested in CuO p-type semiconductor as layer for O 3 detection [10].…”

Chemical Vapour Deposition of Gas Sensitive Metal Oxides

“…These changes produced a reduction in the baseline resistance of the sensors, with resistance decreasing with decreasing film thickness, with an attendant modification of the activation energy of conductance [20]. We note a similar study has demonstrated improved sensor performance in thicker films (30,000 nm) compared to thinner films (15,000 nm) [27], but it is likely that these results are influenced by the properties of the electrodes, specifically the electrode thickness, which need to have a similar thickness to that of the thin film sensor material in order to achieve optimum sensor performance [31]. For NP tungsten oxide, CVD has been used to control the size of NPs to improve sensor performance, with particles with sizes below 100 nm having better sensing properties to NO 2 regardless of processing parameters such as the oxygen pressure during CVD or the subsequent annealing temperature.…”

Thickness effect on sensing properties of pure Cu2O thin films under sub-ppm O3 levels

“…Various materials have been investigated for their potential application as based ozone gas sensors [2,3]. For instance, n-type materials such as In 2 O 3 [4] and WO 3 [5][6][7][8] thin films have received a great deal of attention during the last few years. In particular, In 2 O 3 nano-crystalline films have been found to operate and detect ozone concentrations as low as few ppb at room temperature, this makes them as a good promising candidates for the conception of low energy consumption and low-cost devices [9,10].…”