Correlation between contact surface and friction during the optical glass polishing

Belkhir, Nabil; Aliouane, Toufik; Bouzid, D.

doi:10.1016/j.apsusc.2013.10.008

Cited by 45 publications

(24 citation statements)

References 13 publications

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“…And many researches have been done on this factor in several kinds of polishing technologies. Belkhir et al [1] proved that it is very important to control the contact pressure and the polisher form according to the pressure distribution in order to guarantee a very high quality of the polished surface. Yang et al [2] built the pressure and velocity dependence of the material removal rate (MRR) in the fast polishing process (FPP) based on the direct contact between the wafer and the pad.…”

Section: Introductionmentioning

confidence: 99%

Effect of the inflated-pressure to the tool influence function for polishing using SR bonnet

Wang

Zhong³

et al. 2014

SPIE Proceedings

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The purpose of this paper is to study the effect of the inner pressure to the tool influence function (TIF) for polishing using a semi-rigid (SR) bonnet tool. The simulation model of a Semi-rigid (SR) bonnet polishing tool polishing BK7 is demonstrated and the pressure distribution data under different inflated-pressures in the contact area has been extracted. It's observed that the inflated-pressure has few effects to the polishing pressure, and their shapes are also Gaussian-like. Hence, we made a hypothesis that the effect of inflated-pressure to the TIF is rather small. To verify this hypothesis, a group of experiments to generate TIFs under different inflated-pressure are conducted, and the hypothesis has been proved to be correct through comparing these TIFs.

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Section: Introductionmentioning

confidence: 99%

Effect of the inflated-pressure to the tool influence function for polishing using SR bonnet

Wang

Zhong³

et al. 2014

SPIE Proceedings

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“…They determined microscopic basic courses such as approaching, contact, indentation and pull-out of abrasive particles on optical surfaces [1][2][3], in turn they determined outcomes of polishing directly.…”

Section: Introductionmentioning

confidence: 99%

Investigation of factors influencing microscopic interactions between the diamond indenter and material surfaces in nano-indentation

Wei¹,

Li²,

Yang³

et al. 2015

Applied Surface Science

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“…The critical cutting depth of the material is extremely small. When the instantaneous cutting depth of the abrasive grains did not reach the critical cutting depth, the material is removed by plastic deformation [3]. When the instantaneous cutting depth of the abrasive grains reached beyond the critical cutting depth, micro cracks are generated inside the material, as the micro cracks propagates onto the machined surfaces, the material was removed by brittle fracture [4] and powdering [5,6].…”

Section: Introductionmentioning

confidence: 99%

Effect to the Surface Composition in Ultrasonic Vibration-Assisted Grinding of BK7 Optical Glass

et al. 2020

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Because of the changes in cutting conditions and ultrasonic vibration status, the proportion of multiple material removal modes are of uncertainty and complexity in ultrasonic vibration-assisted grinding of optical glass. Knowledge of the effect of machined surface composition is the basis for better understanding the influence mechanisms of surface roughness, and also is the key to control the surface composition and surface quality. In the present work, 32 sets of experiments of ultrasonic vibration-assisted grinding of BK7 optical glass were carried out, the machined surface morphologies were observed, and the influence law of machining parameters on the proportion of different material removal was investigated. Based on the above research, the effect of surface composition was briefly summarized. The results indicated that the increasing of spindle rotation speed, the decreasing of feed rate and grinding depth can improve the proportion of ductile removal. The introduction of ultrasonic vibration can highly restrain the powdering removal, and increase the proportion of ductile removal. Grinding depth has a dominant positive effect on the surface roughness, whereas the spindle rotation speed and ultrasonic amplitude both have negative effect, which was caused by the reduction of brittle fracture removal.

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Correlation between contact surface and friction during the optical glass polishing

Cited by 45 publications

References 13 publications

Effect of the inflated-pressure to the tool influence function for polishing using SR bonnet

Effect of the inflated-pressure to the tool influence function for polishing using SR bonnet

Investigation of factors influencing microscopic interactions between the diamond indenter and material surfaces in nano-indentation

Effect to the Surface Composition in Ultrasonic Vibration-Assisted Grinding of BK7 Optical Glass

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