Correlating structural and mechanical properties of AlN/TiN superlattice films

Koutná, Nikola; Řehák, Petr; Chen, Zhuo; Bartosik, Matthias; Fallmann, Markus; Černý, Miroslav; Zhang, Zaoli; Friák, Martin; Šob, Mojmı́r; Mayrhofer, Paul H.; Holec, David

doi:10.1016/j.scriptamat.2019.02.021

Cited by 32 publications

(10 citation statements)

References 34 publications

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“…Although a high hardness is generally associated with a high Young's modulus, these values are not positively correlated in this work because the differing E values could have been affected by the changing coating thickness [34]. After conducting indentation tests, Koutná et al [35] discovered that the Young's modulus of (111)-AlN coatings exceeded that of the (111)-TiN coatings. Chen et al [30] found that the Young's modulus of the coatings with a high Ti content were significantly lower than that of the coatings without Ti, which can probably be attributed to the grain refinement; a similar result was also obtained in this study.…”

Section: Resultsmentioning

confidence: 78%

Effects of Input Power Ratio of AlCr/Ti Target on the Microstructural and Mechanical Properties of AlTiCrN Coatings Synthesized by a High-Power Impulse Magnetron Sputtering Process

et al. 2021

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In this study, five AlTiCrN nitride coatings were deposited via high-power impulse magnetron sputtering (HiPIMS). The AlTiCrN coatings were synthesized with high contents of Al or Ti and a lower fraction of Cr, using Ti and Al70Cr30 targets with five different input power ratios. Electron probe microanalyzer results revealed that the increased rate of Ti contents in the coatings can be divided into two regions due to the difference of power densities for HiPIMS (>0.5 kW/cm2) and modulated pulsed power (MPP) (<0.5 kW/cm2). The deposition rate and thickness of the coatings depended on the sputtering yield of two metal targets under HiPIMS and MPP modes. The grain size of the coatings decreased from 60 to 40 nm as the input power ratios of the AlCr/Ti targets decreased due to their lower thickness values and lower Al content. Selected area electron diffraction patterns and X-ray diffraction results revealed that the TiN and AlTiN phases can be found in the coating containing higher Ti content, whereas the AlN, CrN, and AlCrN phases were observed in the coating with a higher Al concentration. Nevertheless, decreasing the concentration of Ti had a detrimental effect on the mechanical properties of AlTiCrN coatings, due to a promotion in grain size and the formation of AlN, which is softer than TiN. It is noticed that our results differed from those in previous reports, in which a grain refinement effect was observed due to increasing Al content. In this work, the effect of processing the parameters of the HiPIMS and MPP power systems on the grain size and the mechanical property of the coating was also discussed.

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Section: Resultsmentioning

confidence: 78%

Effects of Input Power Ratio of AlCr/Ti Target on the Microstructural and Mechanical Properties of AlTiCrN Coatings Synthesized by a High-Power Impulse Magnetron Sputtering Process

et al. 2021

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“…To provide an insight into the K IC dependence on the bilayer period, we performed ab initio calculations quantifying cleavage properties of MoN 0.5 /TaN SL as well as of the monolithic rs-MoN 0.5 , ζ-TaN, and rs-Ta 0.75 N, which were predicted to form in the bulk-like layers of the SL. Specifically, we determined cleavage energy, E c , which represents the energy to separate a solid material into two blocks, and critical stress, σ c , which corresponds to the maximum tensile stress perpendicular to the cleavage plane before cleavage happens 31 . In accordance with the experimental procedure, our SLs were cleaved perpendicularly to the interfaces.…”

Section: Resultsmentioning

confidence: 99%

Mechanistic study of superlattice-enabled high toughness and hardness in MoN/TaN coatings

et al. 2020

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Machining and forming tools exposed to challenging environments require protective coatings to extend their lifetime and reliability. Although transition metal nitrides possess excellent strength and resistance against chemical attacks, they lack ductility and are prone to premature failure. Here, by investigating structural and mechanical properties of MoN-TaN superlattices with different bilayer thickness, we develop coatings with high fracture toughness and hardness, stemming from the formation of a metastable tetragonally distorted phase of TaN up to layer thicknesses of 2.5 nm. Density functional theory calculations and experimental results further reveal a metal-vacancy stabilized cubic Ta 0.75 N phase with an increased Young's modulus but significantly lower fracture toughness. We further discuss the influence of coherency strains on the fracture properties of superlattice thin films. The close interplay between our experimental and ab initio data demonstrates the impact of phase formation and stabilization on the mechanical properties of MoN-TaN superlattices.

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“…Recently periodic multilayer systems alternating (at least) two kinds of component materials have attract number of interests [11][12][13]. They are not only applied in protecting coatings but also in optics as well as other devices [14][15][16][17][18][19].…”

mentioning

confidence: 99%

“…It is important to know how the physical-chemical reactive behaviors at the interfaces affect the mechanical properties of such a multilayer. Most published papers have mainly reported about their mechanical properties and phase structure [3,15,29,37,38]. The effects of layer growth order on the interface diffusion behaviors are rarely reported [39].…”

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confidence: 99%

Interdiffusion behaviors observation in TiN/ZrO N bilayer by XAS and ToF-SIMS

Yuan

Jonnard

Guen

et al. 2020

Applied Surface Science

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Interface behavior plays an important role in multilayer structure. The deep understanding of interface diffusion and reaction is necessary to improve the performance of device with multilayer structure. In the present work, we perform a detailed systematic study on interdiffusion and interaction between the TiN and ZrO x N y layers in the TiN/ZrO x N y bilayer system. A series of TiN/ZrO x N y bilayers with reverse deposition orders or with varied composition have been prepared by radio-frequency reactive magnetron sputtering. Synchrotron radiation x-ray absorption spectroscopy (XAS) and time of flight secondary ion mass spectrometry (ToF-SIMS) are both used to understand well interface diffusion behavior. The XAS results indicate that interaction and interdiffusion extent between TiN and ZrO 2

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Correlating structural and mechanical properties of AlN/TiN superlattice films

Cited by 32 publications

References 34 publications

Effects of Input Power Ratio of AlCr/Ti Target on the Microstructural and Mechanical Properties of AlTiCrN Coatings Synthesized by a High-Power Impulse Magnetron Sputtering Process

Effects of Input Power Ratio of AlCr/Ti Target on the Microstructural and Mechanical Properties of AlTiCrN Coatings Synthesized by a High-Power Impulse Magnetron Sputtering Process

Mechanistic study of superlattice-enabled high toughness and hardness in MoN/TaN coatings

Interdiffusion behaviors observation in TiN/ZrO N bilayer by XAS and ToF-SIMS

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