Correlating chemical and water purity to the surface metal on silicon wafer during wet cleaning process

Sinha, Drew

doi:10.1080/00986440213129

Cited by 2 publications

(3 citation statements)

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“…A general overview of sample preparation methods is provided here, and full details are provided by Rieck. 1 First, the DLC‐on‐silicon collectors were cleaned with a series of solvents using modified RCA cleaning methods 1 , 19 to remove as much of the crash debris as possible. Then, the samples were mounted face down on rigid, conductive substrates for thinning.…”

Section: Methodsmentioning

confidence: 99%

Depth profiling and standardization from the back side of a sample for accurate analyses: Emphasis on quantifying low‐fluence, shallow implants in diamond‐like carbon

Rieck

Jurewicz

Hervig

et al. 2023

Rapid Comm Mass Spectrometry

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Back-side thinning of wafers is used to eliminate issues with transient sputtering when analyzing near-surface element distributions. Precise and accurate calibrated implants are created by including a standard reference material during the implantation. Combining these methods allows accurate analysis of low-fluence, shallow features even if matrix effects are a concern.Methods: Implanted Na (<2.0 Â 10 11 ions/cm 2 , peaking <50 nm) in diamond-like carbon (DLC) film on silicon (solar wind returned by NASA's Genesis mission) was prepared for measurement as follows. Implanted surfaces of samples were epoxied to wafers and back-side-thinned using physical or chemical methods. Thinned samples were then implanted with reference ions for accurate quantification of the solar wind implant. Analyses used a CAMECA IMS 7f-GEO SIMS in depthprofiling mode.Results: Back-side-implanted reference ions reduced the need to change sample mounts or stage position and could be spatially separated from the solar wind implant even when measuring monoisotopic ions. Matrix effects in DLC were mitigated and the need to find an identical piece of DLC for a reference implant was eliminated. Accuracy was only limited by the back-side technique itself.Conclusions: Combining back-side depth profiling with back-side-implanted internal standards aides quantification of shallow mono-and polyisotopic implants. This technique helps mitigate matrix effects and keeps measurement conditions consistent. Depth profile acquisition times are longer, but if sample matrices are homogeneous, procedural changes can decrease measurement times.

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Section: Methodsmentioning

confidence: 99%

Depth profiling and standardization from the back side of a sample for accurate analyses: Emphasis on quantifying low‐fluence, shallow implants in diamond‐like carbon

Rieck

Jurewicz

Hervig

et al. 2023

Rapid Comm Mass Spectrometry

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“…1,2 In order to avoid contamination because of the chemicals themselves, ultrapurification processes become necessary to achieve these exigent limits. 3 Hydrogen peroxide (H 2 O 2 ) is one of the most employed liquid phase electronic chemicals, which are also called wet chemicals, because it is employed for cleaning silicon wafer surfaces of organic matter, particulated contamination, and metallic impurities.…”

Section: Introductionmentioning

confidence: 99%

“…Electronic chemicals, which are the chemicals and materials used to manufacture and package semiconductors and printed circuit boards, require extremely low content of metallic impurities to minimize reliability problems in microdevices. , In order to avoid contamination because of the chemicals themselves, ultrapurification processes become necessary to achieve these exigent limits . Hydrogen peroxide (H 2 O 2 ) is one of the most employed liquid phase electronic chemicals, which are also called wet chemicals, because it is employed for cleaning silicon wafer surfaces of organic matter, particulated contamination, and metallic impurities. − It is also useful to remove photoresists and etch copper on printed circuit boards.…”

Section: Introductionmentioning

confidence: 99%

Multiobjective Optimization Applied to the Integration of Polyamide and Cellulose Acetate Reverse Osmosis Membranes in Hybrid Cascades for Ultrapurification of Wet Chemicals

Abejón

Garea

Irabien

2015

Ind. Eng. Chem. Res.

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The present work is focused on three main aims. The first one is the comparison of commercial polyamide (BE from Woongjin Chemical) and cellulose acetate (CE from GE Osmonics) reverse osmosis membranes when applied to the ultrapurification of aqueous hydrogen peroxide solutions. The second one is the search for possible advantages of combination of both types of membranes, which show quite different characteristics, under a hybrid cascade configuration. The results demonstrated that the employment of only polyamide membrane cascades is more competitive than hybrid systems for this application. The third one is the analysis of the influence of the product quality over the optimal economic cascades. The polyamide membrane systems were then formulated adding product quality metrics to economic criteria to afford a bicriteria nonlinear programming (NLP) problem. The Pareto solutions to the multiobjective problem were generated via the epsilon constraint method. On the one hand, maximum economic profit solutions corresponded with the configurations applying bypass. On the other hand, maximum quality solutions were obtained by low recovery rates (specifically in the last stages of the cascade).

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Correlating chemical and water purity to the surface metal on silicon wafer during wet cleaning process

Cited by 2 publications

References 0 publications

Depth profiling and standardization from the back side of a sample for accurate analyses: Emphasis on quantifying low‐fluence, shallow implants in diamond‐like carbon

Depth profiling and standardization from the back side of a sample for accurate analyses: Emphasis on quantifying low‐fluence, shallow implants in diamond‐like carbon

Multiobjective Optimization Applied to the Integration of Polyamide and Cellulose Acetate Reverse Osmosis Membranes in Hybrid Cascades for Ultrapurification of Wet Chemicals

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