Correction of Systematic Behaviour in Topographical Surface Analysis

Quagliotti, Danilo; Baruffi, F.; Tosello, G.; Gasparin, S.; Annoni, M.; Parenti, P.; Sobiecki, R.; Hansen, H. N.

doi:10.3850/978-981-11-0749-8_738

Cited by 2 publications

(2 citation statements)

References 3 publications

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“…Five acquisitions of a single evaluation area of 4 mm × 10 mm were performed on each surface, sampled at 8200 pixels along the x(a)xis, and 21 profiles along the y(a)xis (nominal tip radius 2 μm). Considering the ranges of interest, the expanded uncertainties stated in the calibration certificate of the CI were 10 nm for Ra values below 229 nm, and 24 nm in the Ra interval 229-604 nm [57,58] (rough data are in appendix C, table C1, while details of data processing can be found elsewhere [57]).…”

Section: Correction Of the Systematic Behavior In Surface Characteriz...mentioning

confidence: 99%

Modeling the systematic behavior at the micro and nano length scales

Quagliotti¹

2022

Surf. Topogr.: Metrol. Prop.

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The assessment of the systematic behavior based on frequentist statistics was analyzed in the context of micro/nano metrology. The proposed method is in agreement with the well-known GUM recommendations. The investigation assessed three different case studies with definition of model equations and establishment of the traceability. The systematic behavior was modeled in Sq roughness parameters and step height measurements obtained from different types of optical microscopes, and in comparison with a calibrated contact instrument. The sequence of case studies demonstrated the applicability of the method to micrographs when their elements are averaged. Moreover, a number of influence factors, which are typical causes of inaccuracy at the micro and nano length scales, were analyzed in relation to the correction of the systematic behavior, viz. the amount of repeated measurements, the time sequence of the acquired micrographs and the instrument-operator chain. The possibility of applying the method individually to the elements of the micrographs was instead proven not convenient and too onerous for the industry. Eventually, the method was also examined against the framework of the metrological characteristics defined in ISO 25178-600 with hints on possible future developments.

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Section: Correction Of the Systematic Behavior In Surface Characteriz...mentioning

confidence: 99%

Modeling the systematic behavior at the micro and nano length scales

Quagliotti¹

2022

Surf. Topogr.: Metrol. Prop.

View full text Add to dashboard Cite

show abstract

“…Five acquisitions of a single evaluation area of 4 mm × 10 mm were performed on each surface, sampled at 8200 pixels along the x-axis, and 21 profiles along the y-axis (nominal tip radius 2 µm). Considering the ranges of interest, the expanded uncertainties stated in the calibration certificate of the CI were 10 nm for Ra values below 229 nm, and 24 nm in the Ra interval 229-604 nm [54]- [55] (rough data in Appendix C, table C1).…”

Section: Correction Of the Systematic Behavior In Surface Characteriz...mentioning

confidence: 99%

Modeling the systematic behavior at the micro and nano length scale

Quagliotti

2021

Preprint

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The brisk progression of the industrial digital innovation, leading to high degree of automation and big data transfer in manufacturing technologies, demands continuous development of appropriate off-line metrology methods to support processes' quality with a tolerable assessment of the measurement uncertainty. On the one hand specific-area references propose methods that are not yet well optimized to the changed background, and on the other, international general recommendations guide to effective uncertainty evaluation, but suggesting procedures that are not necessarily proven efficient at the micro-and nano-dimensional scale. The well-known GUM approach (i.e. frequentist statistics) was analyzed with the aim to test consistently its applicability to micro/nano dimensional and surface topography measurements. The investigation assessed three different clarifying situations, giving rise to consistent model equations, and to the achievement of the traceability. The choice of the cases provided a number of influence factors, which are typical liabilities at the micro and nano-length scale, and that have been related to the correction of the systematic behavior, viz. the amount of repeated measurements, the time sequence of the acquired micrographs and the instruments used. Such approach allowed the successful implementation of the GUM approach to micro/nano dimensional and topographic measurements, and also the appraisal of the level of efficacy of the method, its application limits and hints on possible future developments.

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Correction of Systematic Behaviour in Topographical Surface Analysis

Cited by 2 publications

References 3 publications

Modeling the systematic behavior at the micro and nano length scales

Modeling the systematic behavior at the micro and nano length scales

Modeling the systematic behavior at the micro and nano length scale

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