Correction of iso-focal tilt in phase edge lithography by adjustment of primary spherical aberration

Nakao, S.; Tsujita, Kouichirou; Arimoto, Ichiriou; Wakamiya, Wataru

doi:10.1109/imnc.2000.872611

Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE

DOI: 10.1109/imnc.2000.872611

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Correction of iso-focal tilt in phase edge lithography by adjustment of primary spherical aberration

S. Nakao

Kouichirou Tsujita²,

Ichiriou Arimoto³

et al.

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Correction of iso-focal tilt in phase edge lithography by adjustment of primary spherical aberration

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References 6 publications

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